Microfluidic sensor chip system and preparation method thereof

Abstract

The invention discloses a microfluidic sensor chip system, and a preparation method thereof. The microfluidic sensor chip system comprises a substrate layer, one or a plurality of micro fluidic chip layers, one or a plurality of sensor chip layers, and a sensor bearing layer which are laminated via bonding successively; sensor layers are composed via combination of the sensor chip layers and the sensor bearing layer; each sensor layer is designed to be corresponding to different micro fluidic channels of a micro fluidic chip layer or different layers of the plurality of micro fluidic chip layers, so that each micro fluidic chip layer or each micro fluidic channel is provided with a corresponding sensor layer for detection. The microfluidic sensor chip system and the preparation method possess following advantages: the integration degree is high; operation is convenient; cost is low; the sensitivity is high; the micro fluidic channels and the sensors can be separated effectively; flexibility is achieved; and batch production can be realized.

Description

technical field [0001] The invention relates to a microfluidic sensor chip system and a preparation method thereof. Background technique [0002] The microfluidic chip combines biological and microelectronic processing technologies, and integrates the functions of various instruments in the laboratory into a chip of a few square centimeters (or even smaller) for processing. It has many advantages, such as: miniaturization, integration , High detection efficiency, low detection cost, etc. At present, microfluidic chips have been used in biochemistry, medical detection, drug synthesis, drug screening, environmental monitoring and other fields, and have broad development space and good application prospects. The microfluidic system is a miniature operating platform, which can integrate sample preparation, pretreatment, separation, detection and other means, greatly reducing the complexity and time-consuming of analysis. At the same time, because of its simple structure and cl...

AI Technical Summary

Problems solved by technology

This patent can separate the microchannel layer and the sensor layer, but, 1) the preparation process is complicated and there are many assembly components; 2) a variety of materials are used in the preparation process, and the material switching is cumbersome; 3) according to its statement, the device is preferably suitable for detecting micro Particles in the flow channel are to be verified for biological, chemical and drug detection and screening

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