Water cooling system of equal-liquid-level and constant-static-pressure ultraprecise machine tool

Abstract

The invention belongs to a machine tool temperature control technology, and relates to a water cooling system of an equal-liquid-level and constant-static-pressure ultraprecise machine tool. The watercooling system of the ultraprecise machine tool comprises a precise temperature control water tank (1), a circulating water pump (2), a temperature control unit (3), a high-level thermal insulation water tank (4), an overflow pipe (5), a precise temperature sensor (6), a water cooling liquid static-pressure thrust bearing and / or liquid static-pressure radial bearing (7), a refrigeration unit (8)and a refrigeration pipe (9). The water cooling system of the equal-liquid-level and constant-static-pressure ultraprecise machine tool can directly cool a heating part of a ultraprecise liquid static-pressure bearing, prevents transfer of heat onto a bearing component or a worktable, prevents related structures from generating tiny thermal deformation, and guarantees stable performances and the machining precision of the ultraprecise machine tool.

Description

technical field [0001] The invention belongs to the temperature control technology of machine tools, and relates to an equal liquid level constant static pressure ultra-precision machine tool water cooling system. Background technique [0002] In order to ensure high load, rigidity and stability requirements, the main shaft of large ultra-precision vertical lathes usually adopts the support method of hydrostatic bearings (thrust, radial), and the hydrostatic bearing supports form a stable oil film between the two mating surfaces , the two mating surfaces are in a state of complete liquid lubrication, and the support stiffness and stability are closely related to the stiffness of the oil film. During operation, the heat generated by the internal friction of the hydrostatic oil film on the one hand causes its own viscosity change, which may affect the hydrostatic bearing. (thrust, radial) rigidity and stability, on the other hand, the thermal deformation of the table caused by...

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Problems solved by technology

For the treatment of the temperature rise of hydrostatic bearings, it is usually to monitor the temperature of the oil source in the hydraulic system that provides the hydraulic oil source and implement cooling. The heat generated by the work of the bearing, this method is a passive cooling measure, and cannot directly cool the heat-generating parts of the ultra-precision hydrostatic bearing, and the heat will inevitably be transferred to the bearing components or the workbench, which will cause microscopic damage to the relevant structures. Thermal deformation directly affects the performance stability and machining accuracy of ultra-precision machine tools

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