Integral floating anti-disturbance double-stage micro-vibration isolation platform

Abstract

The overall floating anti-disturbance two-stage micro-vibration isolation platform belongs to the field of vibration isolation technology. The first-stage vibration isolators are arranged in an array and support the vibration isolation platform with low rigidity. Supported by building pile foundations, the floating floor slab is not in contact with the vibration isolation platform, and is supported by vibration isolation equipment or the secondary vibration isolator arranged on the vibration isolation platform, and is supported by the vibration isolation equipment and the secondary vibration isolator There is no contact with the floating floor, and the floating floor is made of concrete floor, steel structure floor or the splicing of the two; the invention can eliminate the internal vibration source of the system introduced by personnel walking, experimental operation and auxiliary equipment operation in large / ultra-large vibration isolation Interference can effectively increase the use area of ​​the vibration isolation platform in the anti-microvibration laboratory, which is conducive to the collaborative work of multiple instruments and equipment and the construction of large-scale and complex experimental systems.

Description

technical field [0001] The invention belongs to the technical field of vibration isolation, in particular to an integral floating anti-disturbance double-stage micro-vibration isolation platform. Background technique [0002] At present, vibration interference has become one of the key issues affecting research results in the installation, testing and experiments of precision engineering technology research. Anti-microvibration laboratories equipped with microvibration isolation platforms have gradually become standard configurations in the aerospace and precision engineering fields. With the increasing measurement accuracy of cutting-edge scientific experiments, large-scale micro-vibration isolation platforms have become essential platform equipment for isolating environmental micro-vibration interference in large-scale cutting-edge scientific anti-micro-vibration laboratories at home and abroad. National Institute of Standards and Technology, Germany Top foreign research i...

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Problems solved by technology

[0010] The purpose of the present invention is to solve the problem that all kinds of ultra-precision instruments and equipment placed on a large vibration isolation platform in the anti-microvibration laboratory are easily disturbed by the vibration introduced by the operation and walking of the experimenters, and the utilization rate of the internal space of the anti-microvibration laboratory is limited. In order to solve the problem of inconvenient construction of complex experimental systems, an integral floating anti-disturbance double-stage micro-vibration isolation platform is provided. Effective isolation of environmental micro-vibration interference in each frequency band of high, medium and low frequencies, ensuring that various ultra-precision instruments and equipment work in an optimal environment, and at the same time contributing to the efficient use of the internal space of the anti-micro-vibration laboratory and the construction of experimental devices

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