Process method for repairing arc quartz crucible

Abstract

The invention discloses a novel process method for repairing an arc quartz crucible. The method comprises the following steps of 1, transferring a crucible; 2, performing grinding; 3, cleaning the crucible; 4, performing crucible local inside and outside preheating; 5, repairing concave pits; 6, performing post treatment. During the preheating, the inside and outside temperature difference type preheating is used; during the concave pit repairing, the used bending process is a multilayer filling process; the connection performance is good.

Description

technical field [0001] The invention belongs to the field of silicon crystal preparation devices, and in particular relates to a process mode specially used for repairing a quartz crucible. Background technique [0002] In the production of Czochralski silicon single crystal, the quartz crucible is used as a consumable in direct contact with the raw material, and its cleanliness, hardness, bubble layer thickness and other standards are very strict, so as to ensure normal crystal pulling under long-term high temperature conditions , without the occurrence of seepage and leakage. The arc quartz crucible will inevitably produce bubbles and black spots due to the influence of the process during the production process. The bubbles in the crucible affect the strength of the crucible. When the bubbles are in the crystal pulling environment (negative pressure and high temperature environment), it is very likely Explosion and bursting of bubbles will cause leakage of silicon liquid....

AI Technical Summary

Problems solved by technology

[0004] The present invention aims at the problems of poor melting effect, poor permeation and connection effect, and prone to hidden cracks falling off in the prior art, and provides a new repairing process method, which adopts layer-by-layer superposition in the repairing process. The process method is adopted, and the temperature control method of the internal and external temperature difference is adopted, so that the repair is in the fusion of the welding rod in the molten state, and the filling effect is good.

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