Flexible substrate real-time cooling device for reel-to-reel magnetron sputtering coating system

Abstract

The invention discloses a flexible substrate real-time cooling device for a reel-to-reel magnetron sputtering coating system. The flexible substrate real-time cooling device for a reel-to-reel magnetron sputtering coating system mainly comprises a cooling plate making contact with a flexible substrate. The cooling plate makes direct contact with the flexible substrate and is closely attached to the flexible substrate. A cooling water tank is formed in the back side of the cooling plate. A back plate used for sealing the cooling water tank into the back side of the cooling plate is arranged onthe back side of the cooling plate with a sealing ring. A closed cooling water flow channel formed by the cooling water tank is formed between the cooling plate and the back plate. An external connection water pipe is connected in and communicates with the cooling water flow channel. The external connection water pipe is connected with the interior of a threaded water hole formed in the back platethrough a threaded pipe in a screwing manner. A sealing ring groove is formed between the back plate and the cooling plate, wherein the sealing ring can be inlaid into the sealing ring groove to achieve sealing. A plurality of threaded through holes are formed in the back plate. Threaded countersinks are correspondingly formed in the plate face on the inner side of the cooling plate. The back plate is fixed to the back side of the cooling plate with screws from the lower part. The flexible substrate real-time cooling device for a reel-to-reel magnetron sputtering coating system has the characteristics of being reasonable in structure, convenient to use, good in cooling effect and the like.

Description

technical field [0001] The invention relates to a flexible substrate real-time cooling device for a roll-to-roll magnetron sputtering coating system, and belongs to the technical field of vacuum magnetron sputtering coating. Background technique [0002] At present, in the production of vacuum magnetron sputtering thin films, most manufacturers or research institutions use water-cooled plates or cooling wheels on flexible linings. Among them, the water-cooled plate is designed in the way that the copper tube is embedded in the aluminum plate. Through the contact between the substrate and the surface of the water-cooled plate, the cooling water circulates in the copper tube to achieve the cooling effect. The cooling water in the cooling method does not directly contact the water-cooled plate, but contacts it after passing through the copper tube, which will make the cooling effect less than optimal. Secondly, through the process of embedding copper tubes in aluminum plates, ...

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Problems solved by technology

When the process is in progress, high-power magnetron sputtering will cause the temperature of the substrate to rise sharply, and the substrate at high temperature will wrinkle and bend, which is very unfavorable for the growth of the film layer and affects the coating performance. Therefore, an efficient cooling technique

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