Crystal height measuring device for polycrystalline silicon ingot furnace

A height measuring device, the technology of polycrystalline silicon ingot furnace, which is applied in the direction of crystal growth, polycrystalline material growth, single crystal growth, etc., can solve the problems of affecting the position of the cable tie, affecting the accuracy of measurement, etc., so that the yield can not be wasted, The effect of cost saving and low equipment modification cost

Pending Publication Date: 2018-03-16
SUZHOU JINGYING PV TECH
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Problems solved by technology

However, when the glass rod is lifted, it will affect the positi...

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  • Crystal height measuring device for polycrystalline silicon ingot furnace

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Embodiment Construction

[0010] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0011] Such as figure 1 As shown, a crystal height measuring device for a polysilicon ingot furnace includes a sealing flange 6 arranged on the furnace body, and a measuring quartz rod that can stay in the sealing flange 6 at any position is movable through the sealing flange 6 4. There is a measuring bracket 7 on the upper outside of the furnace body. The measuring bracket 7 is equipped with a measuring scale. The measuring bracket 7 is equipped with an upper limit device whose position can be adjusted up and down. , the distance from the lower limiting device to the upper surface of the sealing flange 6 is the distance from the length of the quartz rod 4 minus the set thickness surface of the seed crystal 3 to the upper surface of the sealing flange 6, the top of the quartz rod 4 is provided with a limiting plate, and the limiting plate slee...

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Abstract

The invention discloses a crystal height measuring device for quickly and accurately detecting the remaining height of the bottom seed crystal, which comprises a sealing flange arranged on the furnace body, and a movable penetrating device in the sealing flange can stay in the sealing flange at any position. For measuring quartz rods, a measuring bracket is provided on the outer upper part of the furnace body, and a measuring scale is provided on the measuring bracket. The distance from the positioning device to the upper surface of the sealing flange is the length of the quartz rod minus the distance from the surface of the set thickness of the seed crystal to the upper surface of the sealing flange. On the portion between the upper limit device and the lower limit device, the distance between the upper limit device and the lower limit device is greater than or equal to the distance from the upper surface of the crystallized seed crystal to the top surface of the top insulation layer and less than the length of the quartz rod .

Description

technical field [0001] The invention relates to a crystal height measuring device for a polycrystalline silicon ingot furnace. Background technique [0002] In the semi-melted polysilicon ingot casting process, the polysilicon fragments are used as seed crystals on the bottom of the crucible, the melting speed of the silicon material is controlled during the melting process, and a certain thickness of silicon material remains at the bottom at the end of the melting step, and the remaining silicon material is used as a long-term The seeding material required by the ingot, and the accurate measurement of the melting degree of the seed crystal becomes the main factor determining the quality of the silicon ingot. [0003] The current measurement method is to insert a quartz rod into the molten silicon liquid, and as the quartz rod descends, the cable tie as a reference object moves upwards, and when it touches the seed crystal, the quartz rod is lifted immediately, and the dista...

Claims

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Application Information

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IPC IPC(8): C30B29/06C30B28/06
CPCC30B28/06C30B29/06
Inventor 郭宽新黄金强冯强
Owner SUZHOU JINGYING PV TECH
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