Resonant single phase unidirectional transducer type surface acoustic wave acceleration sensor

Abstract

The present invention discloses a resonant single phase unidirectional transducer type surface acoustic wave acceleration sensor. The sensor comprises two groups of oscillators having sensitivity foracceleration signals respectively arranged at a middle portion and a tail end of an upper surface of a cantilever beam, the oscillator located at the tail end is taken as a reference, the two groups of the oscillators form a differential structure to facilitate reducing of influences of a temperature and a transverse acceleration; structure parameters of the two groups of the oscillators are identical, output ends of the oscillators are connected, and the two groups of the oscillators are subjected to frequency mixing through a mixer to convert change of external acceleration to change of frequency for output; and each of the two groups of the oscillators comprises one surface acoustic wave delay line and one feedback amplifier, and each surface acoustic wave delay line employs one resonant single phase unidirectional transducer (RSPUDT) with Gaussian function frequency response, wherein each RSPUDT comprises one input transducer and one output transducer. The resonant single phase unidirectional transducer type surface acoustic wave acceleration sensor is good in frequency response characteristic, high in stability, high in sensitivity, good in linearity, low in insertion loss andhigh in anti-noise interference capability, and is suitable for application demands in the fields of automobiles, steamships, trains, etc.

Description

technical field [0001] The invention relates to a resonant single phase unidirectional transducer (Resonant Single Phase Unidirectional Transducer, RSPUDT) type surface acoustic wave acceleration sensor, in particular to a resonant single phase unidirectional transducer type surface acoustic wave with a Gaussian function frequency response An acceleration sensor belongs to the technical field of acceleration sensors. Background technique [0002] There are many types of acceleration sensors, which can be divided into different types according to different applications. In recent years, with the popularization of Internet of Things technology, it has developed rapidly. The acceleration sensor can sense the change of the acceleration signal, and then convert it into a frequency change or a voltage change, providing support for the subsequent circuit to achieve fast response or real-time processing. [0003] Different types of acceleration sensors have their own characteristic...

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Problems solved by technology

[0005] The technical problem to be solved by the present invention is: the surface acoustic wave delay line frequency response passband ripple and group delay fluctuation in the traditional surface acoustic wave acceleration sensor are relatively large, and the stability of the cantilever beam is not high. Acceleration sensor with high sensitivity, good linearity, low insertion loss, and strong anti-noise ability, suitable for the application requirements of automobiles, ships, trains and other fields

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