Cooling component and vacuum film coating device
A technology for cooling components and vacuum coating, which is used in vacuum evaporation coating, lighting and heating equipment, electrical components, etc., can solve the problems of the solar cell film layer being unable to quickly switch the process temperature, and the equipment capacity is low, saving energy consumption. , The effect of improving equipment capacity and increasing cooling area
Pending Publication Date: 2018-03-27
紫石能源有限公司
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Problems solved by technology
[0007] The purpose of the present invention is to provide a cooling component and vacuum coating equipment to solve the problems of inability to quickly switch the process temperature and low production capacity of the equipment in the existing solar cell film growth process
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[0024] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0025] In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it may be mechanically connected or electrically connected; it may be directly connected or indirectly connected through an intermediary, and it may be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.
[0026] Such as figure...
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The invention relates to the field of semiconductor production devices and discloses a cooling component and a vacuum film coating device. The cooling component comprises a cooling plate and a rotating mechanism; the cooling plate comprises a plurality of cooling strips which are communicated with a cooling liquid pipeline; the rotating mechanism comprises a driving piece and a rotating shaft; thedriving piece is connected with one end of the rotating shaft; and the other end of the rotating shaft is connected with the cooling strips. The rotating mechanism drives the cooling strips in the cooling plate to rotate, in a cooling state, the cooling strips are parallel with basic sheets in a cavity, the cooling area is increased, and the cooling efficiency is improved; in a non-cooling state,the driving piece drives the cooling strips to rotate, the cooling strips are made to be perpendicular to the basic sheets in the cavity, the cooling area is reduced, the heating efficiency is improved, fast switching of process temperatures is achieved, the process production time is shortened, the device productivity is improved, and the energy consumption is reduced.
Description
technical field [0001] The invention relates to the field of semiconductor production equipment, in particular to a cooling component and vacuum coating equipment. Background technique [0002] In thin-film solar cell modules, the thin-film layer plays the role of photoelectric conversion, and its performance largely determines the photoelectric conversion efficiency of the cell, that is, the key performance parameter of the cell. Thin film layers are generally grown by MOCVD (MetalOrganic Chemical Vapor Deposition, Metal Organic Chemical Vapor Deposition), and MOCVD production equipment is very expensive. In the entire thin film solar cell production line, the cost of MOCVD equipment occupies a very high proportion. The improvement of its production capacity can greatly reduce the manufacturing cost of cells. [0003] The mechanism of MOCVD is a thermochemical reaction. At a higher temperature (generally between several hundred and 1000 degrees Celsius), a specific process...
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IPC IPC(8): C23C16/46C23C16/18
CPCC23C16/18C23C16/463H01L21/67115H01J37/32522H01L21/67109C23C16/482H01J37/32724C23C16/4411C23C16/46H01L21/67103H01L21/67126H01L31/18C23C14/505C23C14/541F28D15/0266H01J2237/002H01J2237/2001H01L21/68792
Inventor 管长乐
Owner 紫石能源有限公司