Electrode arrangement and plasma source for generating non-thermal plasma and method of operating the plasma source

Abstract

The invention relates to an electrode arrangement (5) for generating an athermal plasma, having a first electrode (7) and a second electrode (9), which are electrically insulated and spaced apart from each other by a dielectric element (11). Viewed from the mutual spacing direction of the electrodes (7, 9), the thickness of the first electrode (7) is at least 10 μm, wherein the second electrode (9) is at least 10 μm in thickness viewed from the mutual spacing direction of the electrodes (7, 9). ) has a thickness of at least 1 μm to at most 5 μm, or at least 5 μm to at most 30 μm. The dielectric element (11) has a thickness of at least 10 μm to at most 250 μm.

Description

technical field [0001] The invention relates to an electrode arrangement and a plasma source for generating a non-thermal plasma, as well as a method for operating the plasma source. Background technique [0002] Electrode arrangements for generating non-thermal plasmas usually have a first electrode and a second electrode, the electrodes being electrically insulated from one another and spatially separated from one another by a dielectric element. Typical uses of such electrode devices or of non-thermal plasmas generated by such electrode devices are in disinfection or sterilization, surface functionalization, and in the field of medicine, especially wound disinfection, wound treatment and healing, treatment of skin allergies, and bacteria , Treatment of viral and fungal skin diseases. It is revealed that the chemical composition of the plasma generated by the electrode arrangement depends largely on the vertical distance from the active surface of the electrode arrangemen...

AI Technical Summary

Problems solved by technology

Conventional electrode arrangements however can only operate effectively at relatively high voltage amplitudes, and therefore for reasons of electrical safety they can hardly or only by taking a considerable amount of time move close enough to the surface to be treated (such as the patient's skin). ), making the plasma chemical composition almost impossible to tune in an ideal and flexible manner

Moreover, conventional electrode devices are designed to be relatively large and especially rigid, which hinders the miniaturization of devices with such electrode devices and the flexible application of electrode device geometries

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