Automatic sample thinning method
A sample and defect technology, applied in the field of automated sample thinning, can solve the problems of low degree of automation, imprecise slicing position, high probability of sample preparation failure, low labor cost, high sample preparation success rate, and high degree of automation. Effect
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[0022] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0023] In a preferred embodiment, as figure 1 and figure 2 As shown, an automated sample thinning method is proposed, which is applied to prepare a failure analysis sample; which may include:
[0024] Step S1, providing an initial sample 1 with a defect 10;
[0025] Step S2, on the surface of the initial sample 1 avoiding the defect 10, forming two grooves with two parallel extension lines on both sides of the defect 10 as starting lines, and the groove width extending to both sides;
[0026] Step S3, filling the two trenches with metal MT different from the initial sample;
[0027] Step S4, using a focused ion beam process to thin both sides of the sample filled with the metal MT, and monitoring the returned particle composition in the thinning process in real time during the thinning process;
[0028] Step S5, when the proportion of the different m...
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