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Universal detection method for reflecting sphere based on computer aided correction

A computer-aided detection method technology, applied in the field of optical measurement, can solve problems such as high cost, poor versatility, and small measurement dynamic range, and achieve the effects of effective correction, reduced accuracy requirements, and simple operation.

Active Publication Date: 2018-04-24
CHINA JILIANG UNIV
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  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to overcome the disadvantages of relatively small dynamic range, poor versatility and high cost in the prior art of reflective sphere measurement, and provide a generalized detection method for reflective sphere based on computer-aided correction

Method used

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  • Universal detection method for reflecting sphere based on computer aided correction
  • Universal detection method for reflecting sphere based on computer aided correction
  • Universal detection method for reflecting sphere based on computer aided correction

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Embodiment

[0033] Embodiment: a kind of reflective sphere generalized detection method based on computer aided correction, adopt reverse Hartman test system, such as figure 1 As shown, the reverse Hartmann inspection system includes a projection screen 1, a CCD camera 2, and a reflective spherical surface 3 to be tested. The projection screen 1 and the CCD camera 2 are placed side by side. 3 faces the projection screen 1 and the CCD camera 2, and the reflective spherical surface 3 to be tested is placed approximately parallel to the plane of the projection screen 1, and the data lines of the projection screen 1 and the CCD camera 2 are respectively connected to the computer.

[0034] A generalized detection method for reflective spherical surfaces based on computer-aided correction, comprising the following steps:

[0035] Step 1, placing the reflective sphere in the reverse Hartmann detection optical path, the projection screen and the CCD camera are placed side by side in the reverse H...

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Abstract

The invention discloses a universal detection method for a reflecting sphere based on computer aided correction. A reverse Hartmann test optical path structure is adopted, the structure and position parameters of a measurement system are optimized by using a computer aided technology, and therefore, the influence of the structure and position parameter error of the system on the surface shape detection result is reduced. The structure and position parameters of a measurement system are pre-calibrated by using traditional three-dimensional coordinate measurement equipment. Then, the local slopeof a reflecting sphere to be detected is measured, and surface shape error data is obtained through an integral method. On the basis, the structure and position parameters of the system are further optimized by using a computer aided technology and a numerical iterative optimization algorithm, and the structure and position parameter calibration error of the measurement system is corrected, and thus, universal reflecting sphere measurement is realized. The invention provides a universal feasible method for the high-precision measurement of a reflecting sphere, and the method has extremely important practical application value.

Description

technical field [0001] The invention relates to the technical field of optical measurement, in particular to a generalized detection method for reflective spherical surfaces based on computer-aided correction. Background technique [0002] As a very important application field and research direction in the field of industrial production and scientific research, reflective spherical surfaces have been more and more widely used in polishing molds and optical components (illumination and imaging), and the requirements for the accuracy of surface shape detection are also increasing. is constantly improving. Although very high detection accuracy can be obtained by using the interferometric detection method, its biggest problem is that the measurement dynamic range is small, the versatility is poor, and the cost is high. A software configurable optical test system (see Peng Su et al., Software configurable optical test system: a computerized reverse Hartmanntest, Applied Optics, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/25
CPCG01B11/254
Inventor 王道档王志超张森龚志东刘维孔明赵军郭天太
Owner CHINA JILIANG UNIV
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