Graphene infrared sensor based on photonic crystal photoresponse enhancement technology and preparation method thereof

Abstract

The invention discloses a graphene infrared sensor based on a photonic crystal photoresponse enhancement technology and a preparation method thereof. The graphene infrared sensor comprises a silicon wafer. An insulation layer is set on partial silicon wafer. An electrode layer is set on the insulation layer. When the silicon wafer with a silicon dioxide layer is selected, the electrode layer is directly formed on the partial silicon wafer. A photosensitive nano-graphene material layer is set on the partial electrode layer and the partial silicon wafer. Photonic crystal parts prepared through photoetching are set on all the rest electrode layer, the photosensitive nano-graphene material layer and all the rest silicon wafer. According to the graphene infrared sensor, a new-type nano-graphenematerial is taken as a photosensitive material and photonic crystals are added to gather infrared rays of specific wavelengths, so a photoresponse rate is improved, a preparation process is simple, the cost is low, and the graphene infrared sensor is a quantum sensor without refrigeration.

Description

technical field [0001] The invention belongs to the field of photoelectric sensors, in particular to a graphene infrared sensor based on photonic crystal photoresponse enhancement technology and a preparation method thereof. Background technique [0002] Infrared detection technology has an extremely wide range of applications, and with the continuous development and popularization of infrared detection technology, new applications are constantly being developed. At present, it mainly focuses on four commercial uses: thermal imaging cameras, automotive active safety technology, and infrared imaging and monitoring in smartphones. It is estimated that by the end of 2017, the market share of commercial imaging will surpass that of military use, accounting for more than 50% of the market, reaching US$3 billion. Infrared thermal imager applications are concentrated in electrical equipment testing, mechanical and electrical equipment testing, building testing and product quality ...

AI Technical Summary

Problems solved by technology

Its cost is lower, but the sensitivity and response speed are not as good as cooled narrowband semiconductors

Moreover, whether it is a cooled or uncooled detector, it can only detect a wide range of infrared wavelengths, and cannot effectively distinguish infrared light of different wavelengths.

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