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Aluminum modified acidic silica sol and preparation method thereof

An acid silica sol, aluminum modification technology, applied in chemical instruments and methods, silicon compounds, inorganic chemistry, etc., can solve problems such as instability of silica sol

Active Publication Date: 2021-08-20
临汾博利士纳米材料有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of the shortcomings of the prior art described above, the object of the present invention is to provide an aluminum-modified acidic silica sol and a preparation method thereof, which is used to solve the problem of silica sol instability in the pH 1-5 region in the prior art, Simultaneously prepared silica sol concentration, particle size, viscosity, pH and other physical parameters can be controlled

Method used

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  • Aluminum modified acidic silica sol and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] (1) Preparation of sodium metaaluminate solution: 60 mg of sodium metaaluminate was weighed and dissolved in 60 L of pure water.

[0033] (2) getting particle diameter is 6~15nm, concentration is 30% alkaline silica sol 50kg, through 50kg cation exchange resin (001 * 7 type) reaction obtains acidic silica sol, pH is 2.3, is heated under the situation of stirring to 100°C, keep stirring, the stirring speed is 150rpm / min, add the sodium metaaluminate solution obtained in step (1) dropwise at a flow rate of 20L / h, the addition amount is 0.12wt%, the concentration is 0.10wt%, and the reaction is 24h to obtain aluminum-modified silicon Sol;

[0034] (3) Adjust the sol obtained in step (2) with 160 mL of acetic acid to a pH of 4.0 to obtain an aluminum-modified acidic silica sol.

[0035] The test results of each parameter are shown in Table 1.

Embodiment 2

[0037] (1) Preparation of sodium metaaluminate solution: 80 mg of sodium metaaluminate was weighed and dissolved in 8 L of pure water.

[0038] (2) get particle diameter and be 50~60nm, concentration is 50kg of alkaline silica sol of 40%, react acidic silica sol through 35kg cation exchange resin (Lewatit-100 type), pH is 2.0, under the situation of stirring, be heated to 105°C, keep stirring, the stirring speed is 100rpm / min, add the sodium metaaluminate solution obtained in step (1) dropwise at a flow rate of 3L / h, the addition amount is 0.16wt%, the concentration is 1wt%, and the reaction is 6h to obtain aluminum-modified silica sol ;

[0039] (3) Adjust the sol obtained in step (2) with 280 mL of acetic acid to a pH of 3.0 to obtain an aluminum-modified acidic silica sol.

[0040] The test results of each parameter are shown in Table 1.

Embodiment 3

[0042] (1) Preparation of sodium metaaluminate solution: 25 mg of sodium metaaluminate was weighed and dissolved in 250 mL of pure water.

[0043] (2) Take 50kg of alkaline silica sol with a particle size of 20-30nm and a concentration of 35%, react with 50kg of cation exchange resin (PC003 type) to obtain acidic silica sol, pH is 2.2, and heat to 100°C while stirring , keep stirring, the stirring speed is 120rpm / min, dropwise add the sodium metaaluminate solution obtained in step (1) at a flow rate of 0.1L / h, the addition amount is 0.05wt%, the concentration is 10wt%, and the reaction is 3h to obtain aluminum-modified silica sol;

[0044] (3) Adjust the sol obtained in step (2) with 100 mL of acetic acid to a pH of 5.0 to obtain an aluminum-modified acidic silica sol.

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Abstract

The invention provides an aluminum-modified acidic silica sol and a preparation method thereof. The preparation method at least includes the following steps: (1) reacting the alkaline silica sol with a cation exchange resin to obtain an acidic silica sol; (2) heating the acidic silica sol To a certain temperature, keep warm, add aluminate solution, and react to obtain aluminum-modified silica sol; (3) Use organic acid to adjust the pH of aluminum-modified silica sol to 1~5 to obtain aluminum-modified acidic silica sol. The silica sol prepared by the above method can exist stably under acidic conditions.

Description

technical field [0001] The invention relates to an aluminum-modified acidic silica sol and a preparation method thereof, belonging to the field of chemical industry. Background technique [0002] Combining chemical reaction and mechanical grinding, chemical mechanical polishing has become the most effective planarization technology recognized worldwide, and is widely used in the planarization of the surfaces of various chips, conductors, optical and electronic components. Silica sol polishing liquid is the most representative abrasive in the chemical mechanical polishing process, which can achieve better surface polishing quality. At present, the production technology of alkaline silica sol is very mature, and there are many patents on its preparation and application at home and abroad. However, the acidic silica sol, especially the acidic silica sol with high concentration and small particle size, is often stored for less than one month, which restricts its large-scale pro...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B33/148
CPCC01B33/1485
Inventor 张泽芳张文娟
Owner 临汾博利士纳米材料有限公司
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