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Polycrystalline silicon rod automatic disassembly device

A technology for automatic disassembly and polysilicon rods, which is applied in the direction of program-controlled manipulators, manufacturing tools, chucks, etc., can solve the problems such as the small adjustable range of the tilting height of the fixture, the inability to detect the actual shape of silicon rods, and the inability to realize automatic disassembly of rods, etc. Achieve the effects of reducing labor intensity, meeting operational needs, and improving adaptability

Active Publication Date: 2020-05-12
HARBIN BOSHI AUTOMATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] High-purity polysilicon is a common basic raw material used in the electronics industry and solar photovoltaic industry. The inverted U-shaped polysilicon rods generated in the reduction furnace are all assisted by mechanical arms to remove the rods. The structure of the mechanical arm is simple and practical, but it can only Realize manual operation, and the degree of automation is low. Patent document CN205928720U discloses a mechanical arm for silicon rods. Using this mechanical arm, honeycomb-shaped and concentric furnace-shaped silicon rods in large-scale reduction furnaces can be disassembled safely and quickly. , which improves the efficiency of dismantling polysilicon rods and improves the degree of automation, but there are still some mismatches between the mechanical arm and the actual working conditions. For example, the actual shape of the silicon rod cannot be detected during the dismantling process, and the fixture cannot adapt For some polysilicon rods with special growth postures, the adjustable height of the clamps is small, and it is impossible to realize fully automatic removal of rods, etc.

Method used

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  • Polycrystalline silicon rod automatic disassembly device
  • Polycrystalline silicon rod automatic disassembly device
  • Polycrystalline silicon rod automatic disassembly device

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Embodiment Construction

[0035] The specific embodiment of the present invention sees Figure 1 to Figure 20, an automatic removal device for polysilicon rods, which includes a track 1, an X-axis T-shaped mobile frame 2, a three-degree-of-freedom trolley 3, a suspension mechanism 4, a turning mechanism 5, a gripper mechanism 6, a silicon rod detection system 7, and an electrical control system 8, wherein the track 1 is set above the side of the reduction furnace A, the X-axis T-shaped mobile frame 2 spans above the reduction furnace A, the X-axis T-shaped mobile frame 2 can move along the track 1 and the ground in the X-axis direction, and the X-axis A three-degree-of-freedom trolley 3 is provided on the side of the beam 22 of the axial T-shaped mobile frame 2. The three-degree-of-freedom trolley 3 can move along the beam 22 in the Y-axis. The three-degree-of-freedom trolley 3 also has two degrees of freedom of Z-axis lifting and W-axis rotation. The lower end of the rotating shaft 336 provided by the...

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Abstract

An automatic disassembly device for a polycrystalline silicon rod comprises a rail 1, an X-axis T-shaped movable frame 2, a three-degree-of-freedom trolley 3, a suspension mechanism 4, an overturningmechanism 5, a gripper mechanism 6, a silicon rod detection system 7 and an electrical control system 8. The X-axis T-shaped movable frame 2 can move along the rail 1 and the ground in the X-axis direction. The three-degree-of-freedom trolley 3 is arranged on the side face of a crossbeam 22 of the X-axis T-shaped movable frame 2. The lower end of a rotary shaft 336 arranged on the three-degree-of-freedom trolley 3 is connected with the suspension mechanism 4. The lower end of the suspension mechanism 4 is hinged to the overturning mechanism 5. The side face of the overturning mechanism 5 is connected with the gripper mechanism 6. The gripper mechanism 6 is provided with the silicon rod detection system 7. The X-axis T-shaped movable frame 2 is further provided with the electrical control system 8. The automatic disassembly device can adapt to the polycrystalline silicon rod of a special growth posture, full automation of rod disassembly operation is achieved, and production efficiencyis improved.

Description

technical field [0001] The invention relates to an automatic disassembly device for polycrystalline silicon rods, which belongs to the field of high-purity polycrystalline silicon production equipment. Background technique [0002] High-purity polysilicon is a common basic raw material used in the electronics industry and solar photovoltaic industry. The inverted U-shaped polysilicon rods generated in the reduction furnace are all assisted by mechanical arms to remove the rods. The structure of the mechanical arm is simple and practical, but it can only Realize manual operation, and the degree of automation is low. Patent document CN205928720U discloses a mechanical arm for silicon rods. Using this mechanical arm, honeycomb-shaped and concentric furnace-shaped silicon rods in large-scale reduction furnaces can be disassembled safely and quickly. , which improves the efficiency of dismantling polysilicon rods and improves the degree of automation, but there are still some mis...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B25J9/10B25J9/16B25J15/00
CPCB25J9/10B25J9/1612B25J15/00
Inventor 岳洪白金姜喆张佳乐刘昊张兆东王明明徐健斌李金柱
Owner HARBIN BOSHI AUTOMATION