Gas-liquid-solid three-phase abrasive flow polishing tool based on hydrodynamic cavitation structure

Abstract

The invention discloses a gas-liquid-solid three-phase abrasive flow polishing tool based on a hydrodynamic cavitation structure. The gas-liquid-solid three-phase abrasive flow polishing tool comprises a gas-liquid-solid three-phase mixing device, a straight-through adapter, a processing tool automatic-rotation motion device, a hollow runner tube, a cavitation polishing device and a workpiece fastening platform, wherein a workpiece is mounted on the workpiece fastening platform; the gas-liquid-solid three-phase mixing device is arranged above the whole device; a lower-end outlet of the gas-liquid-solid three-phase mixing device is fixedly connected with the upper end of the straight-through adapter; the lower end of the straight-through adapter is connected with the processing tool automatic-rotation motion device; the processing tool automatic-rotation motion device is connected with the cavitation polishing device through the hollow runner tube; and the workpiece fastening platform is arranged below the cavitation polishing device. The gas-liquid-solid three-phase abrasive flow polishing tool adopts a large inlet, a middle constraint runner and a relatively great outlet runner, realizes hydraulic cavitation of liquid, and improves processing efficiency; and a motor drives the whole polishing tool to rotate, so that the problem that the workpeice surface polishing is uneven iseffectively solved.

Description

technical field [0001] The invention relates to the field of precision and ultra-precision polishing, and more specifically relates to a gas-liquid-solid three-phase abrasive flow polishing tool based on a hydraulic cavitation structure. Background technique [0002] With the rapid development of modern optics, electronic information and other fields, more and more precise and ultra-precise optical and semiconductor components are used. It is of great significance to realize the ultra-precision polishing of the working surface of such optical components. [0003] Existing methods applied to precision machining of electronic information materials are mainly divided into tool contact polishing and fluid non-contact polishing. Compared with tool contact polishing, fluid non-contact polishing is not easy to produce processing deterioration layer due to the buffering effect of fluid medium, and is more suitable for ultra-precision processing of large-area or free-form surface opt...

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Problems solved by technology

For example, patent CN201510056123.1 proposes an ultrasonic polishing processing device using gas-liquid-solid three-phase abrasive flow. The device uses ultrasonic waves to generate ultrasonic cavitation to improve processing efficiency, but the utilization rate of ultrasonic energy consumption is relatively low, and most of the energy is in the form of thermal energy. Form loss, and a well-adapted set of ultrasound equipment is expensive

Another example is the Chinese invention patent with the application number CN201610914661.4, which proposes a high-efficiency fluid finishing method and device based on the structural cavitation effect, using the Venturi tube structure to generate structural cavitation to improve processing efficiency, but there is no specific description The structure has a specific internal structure, and under certain pressure and external conditions, the cavitation effect of the structure is not obvious, and the polishing uniformity is not good

For another example, the Chinese invention patent with the application number CN201510056821.1 proposes a precision fluid disk polishing device for ultra-smooth surfaces based on three-phase abrasive flow. particle movement, thereby improving the polishing efficiency, but this method only injects microbubbles from the outside, and it cannot be concluded whether cavitation will occur, and the microjet energy generated by ordinary microbubbles is much smaller than that of hydraulic cavitation or ultrasonic cavitation, which improves the polishing efficiency. The efficiency capacity is limited; at the same time, this method uses three inlets to feed abrasive flow and three inlets to feed microbubbles, which cannot be removed uniformly on the circumference, and requires more external equipment and high cost

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