Device and method for measuring laser beam quality factor in laser-water jet composite processing

A technology of laser beam quality and composite processing, applied in interference spectroscopy, laser welding equipment, metal processing equipment, etc. The processing technology cannot be implemented quickly and easily, so as to avoid the decrease of precision and optimize the processing parameters.
CN108213748BActive Publication Date: 2019-07-09SHANDONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHANDONG UNIV
Publication Date
2019-07-09

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Abstract

The invention relates to a measuring device and method used in laser-water jet composite processing, in particular to a laser beam quality factor measuring device and method used in laser-water jet composite processing, wherein the laser beam quality factor measuring device and method can measure laser beam quality factors (M2) in the laser-water jet composite micro-processing. The device is composed of a waterproof sealing box, linear guide rails driven by a screw rod, a laser focusing lens bracket, a laser focusing lens, an upright post, a precise three-axis motion platform, a water jet nozzle, a base and a light spot analyzer. The device is controlled according to the method to perform measurement in the laser-water jet composite processing. By the adoption of the device and method, thelaser beam quality in laser-water jet composite micro-processing is improved through measurement, the device and method fill up the technical gap of corresponding measuring devices and methods, the measurement of laser beams with power density exceeding the range limit of the light spot analyzer can be realized, and a theoretical basis is provided for selection of appropriate processing process conditions and optimizing of processing parameters for laser-water jet composite micro-processing.
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Description

[0001] 1. Technical field

[0002] The invention relates to a measuring device and method in laser-water jet composite processing, especially capable of measuring the laser beam quality factor (M 2 ), a laser beam quality factor measurement device and method in laser-water jet composite processing.

[0003] 2. Background technology

[0004] The document "An investigation of hybrid laser–waterjet ablation of silicon substrates" (International Journal of Machine Tools&Manufacture, 2012, volume 56, pages 39-49) discloses a laser-water jet composite micromachining technology, which can realize hard and brittle materials Nearly damage-free microfabrication. The technology uses a laser beam to heat the material, and the softened material is removed by erosion with a water jet beam. The literature "Ananalytical model for the prediction of temperature distribution and evolution in hybrid laser-waterjet micro-machining" (Precision Engineering, 2017, Volume 47, Pages 33-45) shows that ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
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