A MEMS sensor for parallel detection of two-dimensional physical quantities

Abstract

The invention relates to a MEMS sensor for parallel detection of two-dimensional physical quantities, wherein the two-dimensional physical quantities are micro-sound and temperature. The MEMS sensor comprises: a micro-sound sensor and a temperature sensor; the two sensors are connected in parallel; the micro-sound sensor is a cantilever beam Microphone sensors with a number greater than one. The MEMS sensor provided by the invention adopts the multi-beam structure cantilever beam, which is more conducive to the long-term stable operation of the photoacoustic spectrum, and can utilize the characteristics of different strength and hardness of the cantilever beam with different sensitivity. When the cantilever beam with higher sensitivity is broken due to too high sound pressure When the temperature is high, other cantilever beams can still be selected as microphones for continuous detection, so as to achieve the unification of sensor sensitivity and reliability; the fusion of temperature sensors is beneficial to eliminate the error of temperature on the detection of cantilever beam microphones and improve the accuracy of photoacoustic spectrum detection.

Description

technical field [0001] The invention relates to a sensor, in particular to a MEMS sensor for parallel detection of two-dimensional physical quantities. Background technique [0002] Since the 21st century, with the development of the global energy Internet and the continuous improvement of people's living standards, the scale of the power grid and the voltage level of power supply and consumption have become higher and higher, especially with the application of high-voltage projects, the capacity of transformers is also expanding. As a result, the failure rate and repair time of transformers are also increasing. Therefore, it is very important to monitor the transformer status. Studies have shown that the detection of dissolved gas in transformer insulating oil is one of the most effective methods for analyzing the types of faults in power transformers. Therefore, real-time detection of gases in transformer insulating oil to analyze the types of transformer faults can reduc...

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Problems solved by technology

However, the cantilever beam microphone mostly adopts a single beam structure, and its accuracy, sensitivity and reliability are all affected by the single beam. If the airflow introduction speed is too fast or the flow rate is too large during the gas detection process, the cantilever beam will be broken and eventually terminated. detection, thus affecting the accuracy and stability of detection

In addition, there are complex multi-physical quantities such as temperature, sound, and gas in the photoacoustic cavity, and changes in temperature can also cause deformation of the cantilever beam, which affects the sensitivity and stability of photoacoustic spectroscopy detection.

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