OLED anode and manufacturing method thereof, manufacturing method of OLED substrate

A manufacturing method and anode technology, which are used in semiconductor/solid-state device manufacturing, organic semiconductor devices, semiconductor devices, etc., can solve the problems of poor uniformity, uneven arrangement of crystal grains, and unsatisfactory reflectivity, and reduce uniformity. , The effect of improving luminous efficiency and improving reflectivity
CN108305959BActive Publication Date: 2020-07-31WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
Publication Date
2020-07-31

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Abstract

The invention discloses an OLED anode, a manufacturing method thereof, and a manufacturing method of an OLED substrate. The manufacturing method of the OLED anode includes: forming a first conductive pattern; forming a reflective layer on the first conductive pattern by using a physical vapor deposition PVD process, the pressure of the PVD process is 0.8-1Pa, the power is 2-4kw, and the inert gas The flow rate is 100-150 sccm; a second conductive pattern is formed on the reflective layer. Based on this, the present invention can reduce the uniformity of crystal grain size in the reflective layer, increase the reflectivity of the reflective layer to visible light, and improve the luminous efficiency of the OLED panel.
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Description

technical field

[0001] The present invention relates to the display field, in particular to an OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode) anode, a manufacturing method thereof, and a manufacturing method of an OLED substrate. Background technique

[0002] Compared with traditional liquid crystal display panels, OLED panels have advantages such as fast response speed, high contrast ratio, and wide viewing angle, and are regarded as the next-generation display technology. The light-emitting principle of the OLED panel is: apply a voltage to the anode and the cathode, and under the drive of the voltage, electron holes are respectively injected from the cathode and the anode into the electron and hole transport layers, migrate to the light-emitting layer, and meet in the light-emitting layer to form excitons and excite light-emitting molecules to emit visible light.

[0003] In the structural design of a top emission (Top emission) OLED panel, silver (Ag)...

Claims

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