Optical surface interval non-contact type measuring device and method

Abstract

The invention belongs to the technical field of optical measurement, and particularly relates to an optical surface interval non-contact type measuring device and method. The swept source optical coherence tomography (SSOCT) principle is used for carrying out optical interval non-contact measurement, and the single measurement depth can reach tens of millimeters, a plurality of optical surfaces ofmost optical systems can be simultaneously measured through one-time detection, a reference arm moves for segmented measurement to achieve a wide range, and the measurement precision completely depends on the axial resolution of the systems. The device and method further optimize a measuring light path, a focusing module is additionally arranged on a focus-adjustable measuring arm, and a proper focusing light path is selected according to sample parameters, reflection light signals of all the optical surfaces can be well collected, and the intensity of interference signals is improved; an achromatic lens is additionally arranged in the movable reference arm, the focusing module of the focus-adjustable measuring arm and a lens set of the movable reference arm are both achromatic lenses, and the measuring precision is further improved.

Description

technical field [0001] The invention belongs to the technical field of optical measurement, and in particular relates to a non-contact measuring device and method for distance between optical surfaces. Background technique [0002] Lenses and lens groups are key components of the optical system, and their center thickness, lens interval processing and installation accuracy play a vital role in the imaging quality of the optical system. The importance of high-precision optical systems is self-evident. There are mainly two methods for measuring the center thickness and spacing: contact and non-contact. The contact measurement method is a relatively traditional measurement method. It mainly uses traditional inspection tools such as dial gauges, dial indicators, etc. to measure the center vertex of the lens to obtain the lens thickness and related lens spacing. It is difficult to use the contact method to find the center of the lens, and the measurement accuracy of traditional ...

AI Technical Summary

Problems solved by technology

Although the use of a balanced detector can improve the signal-to-noise ratio, it can only improve the signal-to-noise ratio of the detection signal, and the noise in the optical path still exists; its measurement accuracy mainly depends on the laser length measurement module, and the measurement error includes laser length measurement and low coherence interference two parts

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