Method of etching metal workpiece and manufacturing method of display panel

Abstract

The invention provides a method of etching a metal workpiece to enable the metal workpiece to have the required profile and a manufacturing method of a display panel. The method of etching a metal workpiece includes the steps: applying a first electric field in the first direction along the etching solution, so as to change distribution in the first direction of metal ion concentration in the etching solution, so as to change the etching speed of the surface of the metal workpiece at different position in the first direction. The method of etching a metal workpiece utilizes the principle of corrosion potential in a copper etching mechanism, during the etching process, utilizes the electric field to guide the metal ions to form concentration gradient or concentration distribution in the etching solution so as to achieve the aim of changing the etching rate of the metal layer at different position and improving the metal line gradient angle, and can improve the etching homogeneity and the yield rate of products.

Description

technical field [0001] The invention relates to the field of etching, in particular to a method for etching a metal workpiece to make it have a desired shape and a manufacturing method for a display panel. Background technique [0002] In recent years, as the competition in the display industry has become increasingly fierce, the requirements for display quality have also become higher and higher. [0003] In the process of preparing metal wires, in order to ensure the charging rate and other technical requirements, the metal wire needs to reach a certain thickness, but the increase in thickness will cause the slope angle to become larger and cause various defects. For example, if the slope angle is too large, the top of the metal wire will The formation of a sharp part may cause a tip discharge to cause breakdown between metal lines of different layers, resulting in a short circuit. In addition, if the slope angle is too large, the insulating layer covering the metal line w...

AI Technical Summary

Problems solved by technology

[0003] In the process of preparing metal wires, in order to ensure the charging rate and other technical requirements, the metal wire needs to reach a certain thickness, but the increase in thickness will cause the slope angle to become larger and cause various defects. For example, if the slope angle is too large, the top of the metal wire will The formation of a sharp part may cause a tip discharge to cause breakdown between the metal lines of different layers, resulting in a short circuit. In addition, if the slope angle is too large, it will cause the insulating layer covering the metal line to form a void at the bottom of the metal line, thereby causing defect

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