Scanned antenna and method for manufacturing same
一种扫描天线、制造方法的技术,应用在扫描天线领域,能够解决成本上升、相控阵列天线价格高等问题
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no. 1 approach
[0119] First, refer to figure 1 with figure 2 . figure 1 As described in detail, it is a schematic partial cross-sectional view near the center of the scanning antenna 1000, figure 2 (A) and (b) are schematic plan views showing the TFT substrate 101 and the slot substrate 201 in the scanning antenna 1000, respectively.
[0120] The scanning antenna 1000 has a plurality of antenna units U arranged in two dimensions. In the scanning antenna 1000 illustrated here, the plurality of antenna units are arranged in concentric circles. In the following description, the area of the TFT substrate 101 and the area of the slot substrate 201 corresponding to the antenna unit U are referred to as "antenna unit area", and the same reference sign U as the antenna unit is given. In addition, such as figure 2 As shown in (a) and (b), in the TFT substrate 101 and the slot substrate 201, the area defined by a plurality of antenna unit areas arranged two-dimensionally is called the "transmissi...
no. 2 approach
[0213] The scanning antenna of the second embodiment will be described with reference to the drawings. The TFT substrate in the scanning antenna of this embodiment and the figure 2 The difference of the TFT substrate 101 shown is that the transparent conductive layer which becomes the upper connection part of each terminal part is provided between the first insulating layer and the second insulating layer in the TFT substrate.
[0214] Figure 8 (a) to (c) are respectively cross-sectional views showing the gate terminal portion GT, the source terminal portion ST, and the transmission terminal portion PT of the TFT substrate 102 in this embodiment. Right and Figure 4 The same components are denoted by the same reference numerals, and the description is omitted. In addition, the cross-sectional structure of the antenna unit area U is the same as the above-mentioned embodiment ( image 3 ) Are the same, so the illustration and description are omitted.
[0215] The gate terminal por...
no. 3 approach
[0231] The scanning antenna of the third embodiment will be described with reference to the drawings. The TFT substrate in the scanning antenna of this embodiment and the Figure 8 The difference of the TFT substrate 102 shown is that the upper connection portion made of a transparent conductive film is not provided in the transmission terminal portion.
[0232] Picture 10 (a) to 10(c) are respectively cross-sectional views showing the gate terminal portion GT, the source terminal portion ST, and the transmission terminal portion PT of the TFT substrate 103 in this embodiment. Right and Figure 8 The same components are denoted by the same reference numerals, and the description is omitted. In addition, the structure of the antenna unit area U is the same as the above-mentioned embodiment ( image 3 ) Are the same, so the illustration and description are omitted.
[0233] The structure of the gate terminal GT and the source terminal ST Figure 8 The gate terminal portion and sour...
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