Calibration module for four-probe resistivity tester

Abstract

The invention provides a calibration module for a four-probe resistivity tester. The calibration module includes a voltmeter, the four-probe resistivity tester, a seven-gear resistance module, a seven-gear rotary switch and a DB9 interface male connector; the voltmeter and the seven-gear rotary switch are both connected with the seven-gear resistance module; the seven-gear rotary switch and the four-probe resistivity tester are both connected with the DB9 interface male connector. The calibration module has the advantages that the cost of a calibration device is reduced, compared with a standard sample, storage and transportation are easier, it is easier to trace to an upper-level standard, and the calibration module has good traceability.

Description

technical field [0001] The invention relates to a calibration module, in particular to a calibration module of a four-probe resistivity tester. Background technique [0002] Resistivity is a very important performance index in semiconductor materials. By measuring the resistivity of materials, information such as the doping concentration of materials can be obtained. The resistivity of silicon wafer material is an important reference index for the photoelectric performance of solar cells, and is an important factor affecting parameters such as solar cell reverse breakdown voltage, reverse leakage current, forward voltage drop, and maximum output current. For silicon crystal production units and enterprises that use silicon crystals to manufacture devices, resistivity is the detection parameter with the largest workload in the silicon wafer detection process, and it is a detection parameter that must appear in the silicon wafer trade contract. Because it will directly affect...

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Problems solved by technology

However, the device has the following problems: 1. The actual current flowing through the standard resistance box cannot be determined; 2. Due to the temperature drift of the resistance, there is an error between the resistance indication value of the standard resistance box and the actual resistance value

Another example is a Chinese invention patent with an application date of 2015.06.16 and an application number of 201520414518.X, which discloses a calibration device for a concrete resistivity meter. The calibration device records that the number of gear switches is 8, and the corresponding calibration circuit The number of groups is 8 groups, and there is a problem of complex circuits

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