Linear inertial piezoelectric actuator with displacement sensing function and its actuation method

Abstract

The invention relates to a linear inertial piezoelectric actuator with a displacement sensing function and an actuating method. The actuator consists of a cylindrical housing, a base, a moving unit, adiamond ring, a piezoelectric stack, an inertial mass block, a permanent magnet and a proportional linear Hall sensor, wherein the bottom end of the cylindrical housing is fixedly connected with thebase; the interior of the cylindrical housing is as follows from top to bottom successively: the moving unit whose left and right ends are closely attached to a rail square groove in the casing, the diamond ring which is connected with the moving unit through an adjusting screw, the piezoelectric stack which is mounted in the diamond ring in an interference manner, the inertial mass block which isbonded under the diamond ring, the permanent magnet which is fixed to the lower surface of the inertial mass block, and the proportional linear Hall sensor which is mounted on the upper surface of the base. The linear inertial piezoelectric actuator with the displacement sensing function and the actuating method in the invention use an asymmetric sawtooth wave to drive the piezoelectric stack; actuation is performed through the principle of inertial impact; the proportional linear Hall sensor is adopted to sense the displacement in real time; the structure is compact and easy to install, theactuation is fast and accurate, the outage is locking, and the clamping force is adjustable.

Description

technical field [0001] The invention belongs to the technical field of inertial piezoelectric actuators, and in particular relates to a linear inertial piezoelectric actuator with a displacement sensing function and an actuating method. Background technique [0002] Inertial piezoelectric actuator is a kind of mechanism that adopts asymmetrical driving signal, asymmetrical mechanical clamping structure or asymmetrical friction force as the control mode, and forms the driving mechanism through inertial impact motion. [0003] Compared with other types of piezoelectric drives, inertial piezoelectric actuators have the main advantages of simple structure, fast response, high resolution, large stroke, fast movement speed, and low cost. positioning accuracy. Therefore, inertial piezoelectric actuators are suitable for occasions that require high resolution and large strokes. At present, scientific and technological workers have successfully applied inertial piezoelectric actuat...

AI Technical Summary

Problems solved by technology

[0004] Generally, linear inertial piezoelectric actuators contain linear guide rails inside the structure, and linear gratings are used to sense displacement. This design greatly increases the lateral size of the actuator, which limits the actuator's use in smaller application environments. In addition, the existing linear inertial actuators generally use additional mechanisms outside the moving block, such as springs, to achieve the adjustment of the clamping force, which brings certain difficulties to processing and assembly.

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