Automatic focusing device and automatic focusing method for electron beam equipment
An electron beam equipment, automatic focusing technology, applied in electron beam welding equipment, welding equipment, metal processing equipment and other directions, can solve the problem of inaccurate focusing current, and achieve the effect of avoiding measurement inaccuracy and improving measurement accuracy
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0036] figure 1 It is a schematic structural diagram of the autofocus device of the electron beam equipment provided by the embodiment of the present invention. Such as figure 1 As shown, the automatic focusing device of the electron beam equipment includes a transmitting unit 110 and an acquiring unit 120 .
[0037] The emitting unit 110 is used to emit a first electron beam to the small hole of the energy tester at a first height, and the energy tester generates a first energy curve; wherein, the direction of the first electron beam and the small hole The centers are on the same center line.
[0038] An acquisition unit 120, configured to acquire, according to the first energy curve, a current value corresponding to a peak value of the first energy as a first optimal focus value.
[0039] Further, the emission unit 110 is also used to emit the Nth electron beam to the small hole at the first height, and the energy tester generates the Nth energy curve; wherein, the direct...
Embodiment 2
[0047] figure 2 It is a schematic flowchart of an automatic focusing method for an electron beam device provided by an embodiment of the present invention. Such as figure 2 As shown, the automatic focusing method of the electron beam equipment includes the following steps:
[0048] Before that, it is necessary to prepare the electron beam and ensure a stable vacuum condition, fix the high voltage at the required voltage value, use the cross centering system to completely coincide the cross wire with the electron beam, and then place the test hole of the energy tester Align the crosshatch to ensure that the electron beam completely covers the hole.
[0049] Step 210, at the first height, emit a first electron beam to the small hole of the energy tester, and the energy tester generates a first energy curve; wherein, the direction of the first electron beam and the center of the small hole are at on the same centerline.
[0050] Wherein, the small hole is placed in the vacu...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 

