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Automatic focusing device and automatic focusing method for electron beam equipment

An electron beam equipment, automatic focusing technology, applied in electron beam welding equipment, welding equipment, metal processing equipment and other directions, can solve the problem of inaccurate focusing current, and achieve the effect of avoiding measurement inaccuracy and improving measurement accuracy

Inactive Publication Date: 2018-09-14
河北众航高能科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The purpose of the present invention is to provide an automatic focusing device and method for electron beam equipment to solve the problem that the existing focusing current is not accurate enough

Method used

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  • Automatic focusing device and automatic focusing method for electron beam equipment
  • Automatic focusing device and automatic focusing method for electron beam equipment

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] figure 1 It is a schematic structural diagram of the autofocus device of the electron beam equipment provided by the embodiment of the present invention. Such as figure 1 As shown, the automatic focusing device of the electron beam equipment includes a transmitting unit 110 and an acquiring unit 120 .

[0037] The emitting unit 110 is used to emit a first electron beam to the small hole of the energy tester at a first height, and the energy tester generates a first energy curve; wherein, the direction of the first electron beam and the small hole The centers are on the same center line.

[0038] An acquisition unit 120, configured to acquire, according to the first energy curve, a current value corresponding to a peak value of the first energy as a first optimal focus value.

[0039] Further, the emission unit 110 is also used to emit the Nth electron beam to the small hole at the first height, and the energy tester generates the Nth energy curve; wherein, the direct...

Embodiment 2

[0047] figure 2 It is a schematic flowchart of an automatic focusing method for an electron beam device provided by an embodiment of the present invention. Such as figure 2 As shown, the automatic focusing method of the electron beam equipment includes the following steps:

[0048] Before that, it is necessary to prepare the electron beam and ensure a stable vacuum condition, fix the high voltage at the required voltage value, use the cross centering system to completely coincide the cross wire with the electron beam, and then place the test hole of the energy tester Align the crosshatch to ensure that the electron beam completely covers the hole.

[0049] Step 210, at the first height, emit a first electron beam to the small hole of the energy tester, and the energy tester generates a first energy curve; wherein, the direction of the first electron beam and the center of the small hole are at on the same centerline.

[0050] Wherein, the small hole is placed in the vacu...

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Abstract

The invention provides an automatic focusing device for electron beam equipment. The device comprises an emitting unit and an acquisition unit; the emitting unit is used for emitting a first electronbeam to the small hole of an energy tester at a first height, and a first energy curve is generated by the energy tester; the direction of the first electron beam and the center of the small hole areon the same central line; and the acquisition unit is used for acquiring a current value as a first optimal focusing value corresponding to the peak value of the first energy according to the first energy curve. Thus, the problem of inaccurate measurement caused by the scattering and refraction of the electron beam is prevented, and the precision of measurement is improved.

Description

technical field [0001] The invention relates to the technical field of electronic processing equipment, in particular to an automatic focusing device and method for electron beam equipment. Background technique [0002] The electron beam is to use the electrons generated by the cathode in the electron gun to be accelerated to a very high speed (0.3-0.7 times the speed of light) under the action of a high-voltage (25-300kV) accelerating electric field between the cathode and anode, and after being converged by the lens, it forms a dense high-speed electron flow with high energy density. [0003] Electron beam welding is widely used in aerospace, atomic energy, national defense and military industry, and automobile because of its advantages of high energy, high power density (104~108W / cm2), no need for electrodes, not easy to oxidize, good process repeatability and small thermal deformation. And electrical and electrical instrumentation and many other industries. The basic p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K15/00
CPCB23K15/0013
Inventor 王刚
Owner 河北众航高能科技有限公司