Isostatic pressing forming mold of rotating target

Abstract

The invention discloses an isostatic pressing forming mold of rotating target. The mold comprises an elastic outer mold, a rigid inner mold and end plugs, the rigid inner mold is arranged in the innercavity of the elastic outer mold, the end plugs are arranged at the two ends of a tubular mold cavity between the elastic outer mold and the rigid inner mold correspondingly, and plastic transition layers capable of being radially compressed with a to-be-formed powder material and can be retracted and deformed along with the elastic outer mold is arranged on a position between one sides, facing the tubular mold cavity, of the end plugs and the to-be-formed powder material, one faces of the plastic transition layers which connected with the end plugs are conical concave surfaces, and conical protrusion matched and cooperate with the conical concave surfaces are arranged on the end plugs. The problems of the trumpet-shape deformation and non-uniform density are solved through the plastic transition layers; a rigid supporting sleeve and a positioning device enable the powder material to be more uniformly filled, an arc-shaped metal clamping plate and a flexible layer are combined to enable the elastic clamping device to tightly wrap round a tubular biscuit all the time, so that the shape of the tubular biscuit is regular, the wall thickness is uniform, the size precision is high; andthe obtaining of the high-performance target is facilitated by sintering, and meanwhile, the later turning amount is reduced, the material utilization rate is increased, and the production cost is reduced.

Description

technical field [0001] The invention relates to a rotating target forming die, in particular to an isostatic pressing forming die for a rotating target. Background technique [0002] In recent years, the flat panel display industry has developed rapidly, and the market for mobile phone touch screens and large flat panel TVs is growing. With the development of the market, the requirements for the preparation technology of flat panel displays are also getting higher and higher. In particular, in the magnetron sputtering device used to prepare metal thin films or metal oxide thin films on glass substrates, rotating targets are gradually replacing the previous planar targets, which also drives the rapid development of ITO rotating targets. [0003] At present, the forming methods of the ITO rotating target body mainly include extrusion, grouting and cold isostatic pressing. Both extrusion and grouting can be formed in near-net dimensions, and have certain advantages in making ...

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is to overcome the problem of trumpet-shaped deformation at both ends of the biscuit caused by the end effect of the mold, and to provide an isostatic pressing molding mold for a rotating target

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