Apparatus for preparing diamond coating in inner bores of wire-drawing dies

Abstract

The invention provides an apparatus for preparing a diamond coating in the inner bores of wire-drawing dies. The apparatus comprises a vacuum chamber, a sample stage, a hot wire, a deflector and a plurality of wire-drawing dies with die holes, wherein the sample stage comprises a first end and a second end arranged face to face; the wire-drawing dies are snapped on the first end of the sample stage at intervals; the second end of the sample stage is provided with a through hole communicating with the die holes; and the hot wire with two ends connecting with electrode columns is horizontally arranged above the sample stage. The apparatus further comprises a gas inlet pipe and a gas exhaust pipe both inserted into a vacuum chamber, wherein the gas exhaust pipe is connected with a pump; the cavity of the deflector has a first end and a second end arranged to face each other, and the radial dimension of the second end is larger than the radial dimension of the first end; the first end communicates with the gas inlet pipe, and the second end is provided with a plurality of diversion pipes communicating with the cavity; and the outlets of the diversion pipes are located directly above the die holes. The apparatus provided by the invention can avoid passing of the hot wire through the inner bores of wire-drawing dies, and plasma groups generated by reaction gas for deposition of the coating around the hot wire is directionally drawn into the die holes in the wire-drawing dies so as to realize uniform deposition of the diamond coating.

Description

technical field [0001] The invention relates to the field of chemical vapor deposition diamond coatings, in particular to a device for preparing diamond coatings in inner holes of wire drawing dies. Background technique [0002] Diamond has high hardness, wear resistance, high thermal conductivity and chemical stability, and is regarded as an ideal coating material for cutting tools and mechanical components. Among them, in the wire drawing process, depositing a diamond coating in the wire drawing die can improve wire drawing. The service life of the mold is to improve production efficiency and reduce production costs. [0003] There are many methods for growing diamond coatings, mainly hot wire chemical vapor deposition (HFCVD), plasma chemical vapor deposition, etc. Among them, the HFCVD method is widely used because of its relatively cheap equipment, easy control of long film, and fast growth rate. However, when the HFCVD method deposits a diamond film in the inner hole...

AI Technical Summary

Problems solved by technology

However, this puts higher requirements on the sample clamper, and it is time-consuming to load the sample. Moreover, when sampling after the deposition is completed, the heating wire must be broken, resulting in a waste of heating wire material and an increase in cost.

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