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PECVD reaction furnace with heat source in furnace and control method thereof

A reaction furnace and heat source technology, which is applied in the field of PECVD reaction furnace and its control, can solve the problems of slow heating and long time, and achieve the effects of rapid heating, increasing production capacity and speeding up the process.

Active Publication Date: 2018-09-28
S C NEW ENERGY TECH CORP
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Problems solved by technology

[0005] The present invention is to solve the problem of slow heating and long time in the prior art, and proposes a method for rapidly returning the temperature of the equipment by adding a new heat source in the PECVD reaction furnace

Method used

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  • PECVD reaction furnace with heat source in furnace and control method thereof
  • PECVD reaction furnace with heat source in furnace and control method thereof
  • PECVD reaction furnace with heat source in furnace and control method thereof

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Embodiment Construction

[0020] In order to make the object, technical solution and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0021] The idea of ​​the present invention is to add a heating source in the reaction furnace to reduce the waiting time for reaching the reaction temperature in the reaction furnace, and at the same time perform heat compensation and precise temperature control on the middle part of the reaction furnace.

[0022] The invention discloses a PECVD reaction furnace with a new heat source in the furnace, which includes a tubular furnace body 1, end covers 2 and furnace doors 3 respectively arranged at both ends of the furnace body, and an external heating device surrounding the outer wall of the furn...

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Abstract

The invention discloses a PECVD reaction furnace with a heat source in the furnace and a control method thereof. The reaction furnace comprises a tubular furnace body (1), an end cover (2) and a furnace door (3), wherein the end cover (2) and the furnace door (3) are arranged at the two ends of the furnace body respectively, a furnace outer heating device, an in-furnace heating device and a temperature control device are surrounded on the outer wall of the furnace body, the furnace heating device is arranged in the cavity of the furnace body, and the temperature control device is used for controlling the furnace outer heating device and the in-furnace heating device. Compared with the prior art, two sets of heat sources are arranged inside and outside the reaction furnace, so that the temperature in the reaction furnace is rapidly heated, the heating waiting time is shortened, the process progress is accelerated, and the productivity is improved; and meanwhile, the temperature compensation is carried out on the center of the reaction furnace, so that the process environment is improved.

Description

technical field [0001] The invention relates to a solar cell sheet manufacturing equipment, in particular to a PECVD reaction furnace with a new heat source added in the reaction furnace and a control method thereof. Background technique [0002] As an inexhaustible renewable energy source for human beings, solar energy has an important influence in the long-term energy strategy due to its unique cleanliness, absolute safety, and relative universality. In photovoltaic applications, the source silicon wafers are processed by special equipment and become solar cells that can directly convert solar energy into electrical energy. It is very important to coat the surface of silicon wafers with anti-reflection coatings in the solar cell manufacturing process. First, the PECVD reactor is the main equipment for anti-reflection coating, and its working principle is to use plasma-enhanced chemical vapor deposition to produce anti-reflection coatings. The stable temperature control of...

Claims

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Application Information

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IPC IPC(8): C23C16/50H01L31/18
CPCC23C16/50H01L31/18Y02P70/50
Inventor 王晨光余仲张勇王凯
Owner S C NEW ENERGY TECH CORP
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