Rapid positioning and batch detection method for micro-defects on surface of large-caliber optical crystal

An optical crystal, batch detection technology, applied in the field of optical engineering, can solve problems affecting the quality and efficiency of micro-defect repair, achieve the effect of real-time monitoring of batch positioning and detection process, and save image acquisition efficiency

Active Publication Date: 2018-10-12
HARBIN INST OF TECH
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Problems solved by technology

Therefore, it is urgent to develop an efficient and stable batch automatic detection system that cannot rely solely on manual operations; in addition, the reliable identification

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  • Rapid positioning and batch detection method for micro-defects on surface of large-caliber optical crystal
  • Rapid positioning and batch detection method for micro-defects on surface of large-caliber optical crystal
  • Rapid positioning and batch detection method for micro-defects on surface of large-caliber optical crystal

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specific Embodiment approach 1

[0050] Specific implementation mode one: as Figures 1 to 7 As shown, the rapid location and batch detection method for micro-defects on the surface of large-aperture optical crystals described in this embodiment is implemented by the following steps:

[0051] 1. Install the optical crystal element to be tested, assemble and adjust the micro-defect detection microscope system, and automatically return to zero on each axis of the crystal element moving mechanism;

[0052] 2. Determine the actual magnification of the microscope based on the raster scanning path of large-diameter components, estimate the field of view of the CCD for defect detection under different magnifications, and select the scanning step for micro-defects on the surface of the entire crystal component;

[0053] 3. Compare the two scanning schemes of "continuous motion acquisition" and "intermittent stop acquisition" in terms of defect scanning efficiency and imaging quality, and formulate a reasonable scanni...

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Abstract

The invention relates to a rapid positioning and batch detection method for micro-defects on the surface of a large-caliber optical crystal, belongs to the field of optical engineering and aims to solve the problem about batch, rapid and accurate detection of the micro-defects on the surface of large-caliber optical crystals. The method comprises the following steps: firstly, completely scanning awhole crystal element with a raster scanning manner of continuous motion acquisition; then, developing an image acquisition program and establishing communication with a numerical control motion program to achieve the function of acquiring images according to the real-time scanning position of the crystal; performing ellipse fitting of the outline position of the defect points in the acquired images based on an image processing algorithm, and obtaining information such as the number, position and size of the defect points in the single image; finally, developing an automatic defect point detection program and establishing a database based on Microsoft Access micro-defect information to realize batch detection of the acquired images and save and update the defect of the defect point information. A detailed parameter basis is provided for repairing and controlling of the micro-defects on the surface of the large-caliber crystal element.

Description

technical field [0001] The invention belongs to the field of optical engineering, and in particular relates to a rapid location-finding and batch detection method for micro-defects on the surface of large-diameter optical crystals. Background technique [0002] With the rapid development of human society, the shortage of fossil fuels on the earth is becoming more and more serious. Nuclear fusion energy has become the goal that countries all over the world have been pursuing in recent years because of its advantages of abundance, cleanliness and high efficiency. Establishing a large-scale high-energy solid-state laser device is the key to realizing controlled nuclear fusion, and the output energy of the laser nuclear fusion device also directly determines whether the nuclear fusion ignition is successful or not. In order to achieve high-energy output, laser nuclear fusion devices need to use large-scale, high-precision, and high-quality optical components in large quantities...

Claims

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Application Information

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IPC IPC(8): G01N21/88
CPCG01N21/8851G01N2021/8887
Inventor 程健陈明君左泽轩刘启杨浩赵林杰王廷章刘志超王健许乔
Owner HARBIN INST OF TECH
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