Rapid positioning and batch detection method for micro-defects on surface of large-caliber optical crystal
An optical crystal, batch detection technology, applied in the field of optical engineering, can solve problems affecting the quality and efficiency of micro-defect repair, achieve the effect of real-time monitoring of batch positioning and detection process, and save image acquisition efficiency
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[0050] Specific implementation mode one: as Figures 1 to 7 As shown, the rapid location and batch detection method for micro-defects on the surface of large-aperture optical crystals described in this embodiment is implemented by the following steps:
[0051] 1. Install the optical crystal element to be tested, assemble and adjust the micro-defect detection microscope system, and automatically return to zero on each axis of the crystal element moving mechanism;
[0052] 2. Determine the actual magnification of the microscope based on the raster scanning path of large-diameter components, estimate the field of view of the CCD for defect detection under different magnifications, and select the scanning step for micro-defects on the surface of the entire crystal component;
[0053] 3. Compare the two scanning schemes of "continuous motion acquisition" and "intermittent stop acquisition" in terms of defect scanning efficiency and imaging quality, and formulate a reasonable scanni...
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