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A temperature sensor and method of making the same

A technology of temperature sensor and substrate, applied in thermometers, instruments, thermometers with electrical/magnetic components directly sensitive to heat, etc., can solve problems such as delay, and achieve the effect of reducing delay time, speeding up transmission, and improving sensitivity

Active Publication Date: 2020-08-04
FOSHAN SHUNDE SUN YAT SEN UNIV RES INST +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Most of the temperature sensors currently used are capacitive temperature sensors, which include two electrodes and a dielectric material between the two electrodes. The temperature is detected by changing the capacitance value of the dielectric material when it is heated. There is a large delay in the response of the flexible temperature sensor to temperature. In theory, this delay effect of the temperature sensor must exist, which is different from other sensors, such as speed, acceleration, and force sensors, because the heat transfer It takes a relatively long time, so how to improve its sensitivity and reduce the delay time of temperature response on the basis of traditional temperature sensors has become a problem that needs to be solved

Method used

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  • A temperature sensor and method of making the same
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  • A temperature sensor and method of making the same

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preparation example Construction

[0033] refer to figure 2 , the preparation method of a kind of temperature sensor of the present invention, comprises the following steps:

[0034] A, plate dielectric thin film on substrate, make metal electrode 12 respectively on the both sides of plated substrate, concrete steps are:

[0035] First, use acetone to clean the substrate, put it in a drying oven to dry, and mark the front and back sides; use a pull coater to slowly immerse the substrate in the dielectric solution, and after the surface of the dielectric solution is calm, place the substrate vertically and evenly Rise up; dry the substrate at 50°C to 70°C for 8 hours, then dry at 80°C for 2 to 5 hours to obtain a coated substrate, and finally use magnetron sputtering technology to coat the dried coated substrate. Upper metal electrode 12.

[0036] B. Since the heat conduction film 2 itself is sticky, the heat conduction film 2 can be directly glued to the metal electrode 12, that is, the entire temperature se...

Embodiment 1

[0041] Embodiment 1: Silicone material is used as the heat conduction film 2 to be integrated on the temperature sensor.

[0042] Put the temperature sensor integrated with the silicone heat-conducting film and the temperature sensor without the integrated heat-conducting film 2 into the temperature control box. The initial temperature in the temperature control box is 25°C, and then connect the capacitance sample in the box with a capacitance meter, and wait for After the temperature value of the temperature control box is stable, read the initial value of the capacitance, then set the temperature of the temperature control box to 70°C, start it to heat the sample, and record the current capacitance value every 10S until the capacitance value is stable and stop reading .

[0043] Such as image 3 shown, where image 3 a and image 3 b is the graph obtained after performing the same test twice, image 3 a and image 3 The temperature range in the graph of b is 25-70 degre...

Embodiment 2

[0044] In Embodiment 2, a graphite material is used as the heat conduction film 2 to be integrated on the temperature sensor.

[0045]Put the temperature sensor integrated with the graphite heat-conducting film and the temperature sensor without the integrated heat-conducting film 2 into the temperature control box, set the initial temperature, and then use the capacitance meter to connect the capacitance sample in the box, and wait for the temperature of the temperature control box After the value is stable, read the initial value of the capacitance, then set the termination temperature of the temperature control box, start it to heat the sample, and record the current capacitance value every 10S until the capacitance value is stable and stop reading.

[0046] refer to Figure 4 shown, where Figure 4 The initial temperature and end temperature of a are 25 degrees and 70 degrees, Figure 4 The initial temperature and termination temperature of b are 10 degrees and 50 degree...

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Abstract

The invention discloses a temperature sensor. The upper and lower electrodes of a traditional capacitive sensor are integrated with heat conduction films. The heat conduction films can achieve a protection effect and can rapidly transmit the heat of the external portion of the temperature sensor into an internal portion. The manufacturing method of the temperature sensor comprises the following steps of firstly manufacturing a traditional capacitive temperature sensor; and then attaching the heat conduction films to the two electrodes of the temperature sensor. The heat conduction films wrap the external portion of the temperature sensor so that the protection effect can be achieved, and simultaneously the heat can be rapidly transmitted from the external portion of the temperature sensorto the internal portion of the temperature sensor. The sensitivity of the temperature sensor is increased and the delay time of temperature reaction is shortened.

Description

technical field [0001] The invention relates to a temperature sensor and a manufacturing method thereof. Background technique [0002] With the rapid development of science and technology, especially the rapid development of artificial intelligence technology, robots have been widely used in many fields. The development of robots has gradually transitioned from the realization of mechanical functions to the realization of body skin and facial expressions. Human skin can Easily perceive changes in the external environment, such as picking up a glass of water and sensing its heat or cold. In order to enable traditional robots to achieve these functions, the robot needs a sensor that can directly interact with the surrounding environment. Therefore, we designed a flexible temperature sensor By simulating human skin, the robot has the function of sensing temperature. [0003] Most of the temperature sensors currently used are capacitive temperature sensors, which include two el...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01K7/34
CPCG01K7/34
Inventor 王凯冯肖李伟伟林晨欢
Owner FOSHAN SHUNDE SUN YAT SEN UNIV RES INST