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Base material for liquid filter

A liquid filter and substrate technology, applied in membrane filters, filtration and separation, semiconductor/solid-state device manufacturing, etc., can solve the problems of insufficient capture performance and liquid permeability, and achieve high fine particle capture. , the effect of high liquid permeability

Active Publication Date: 2018-10-23
TEIJIN LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Prior art such as JP-A-2-251545, JP-A 2010-053245, JP-A-2010-202828, JP-A-7-246322 and JP-A-10-263374 However, it is not sufficient to simultaneously realize the capture performance and liquid permeability for fine particles smaller than about 10 nm.

Method used

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  • Base material for liquid filter
  • Base material for liquid filter

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0105] A polyethylene composition obtained by mixing 15 parts by mass of high molecular weight polyethylene (PE1) having a weight average molecular weight of 4,600,000 and 15 parts by mass of low molecular weight polyethylene (PE2) having a weight average molecular weight of 560,000 was used. A polyethylene solution was prepared by mixing with a previously prepared mixed solvent of 67.5 parts by mass of liquid paraffin and 2.5 parts by mass of decalin (decalin) so that the concentration of the total polyethylene resin was 30% by mass.

[0106] At a temperature of 155°C, the polyethylene solution was extruded from the die in a sheet form, and then, the extrudate was cooled in a water bath at 20°C, and a water flow was set on the surface of the water bath, so that from the water bath The mixed solvent discharged from the gelled sheet and suspended on the water surface was produced without reattaching to the sheet (base tape). The base tape was dried at 60° C. for 7 minutes, and ...

Embodiment 2

[0110] A polyethylene composition obtained by mixing 18 parts by mass of high molecular weight polyethylene (PE1) with a weight average molecular weight of 4.6 million and 5 parts by mass of low molecular weight polyethylene (PE2) with a weight average molecular weight of 560,000 was used. It was mixed with a previously prepared mixed solvent of 75.9 parts by mass of liquid paraffin and 1.1 parts by mass of decalin (decalin) so that the concentration of the total amount of the polyethylene resin was 23% by mass to prepare a polyethylene solution.

[0111] At a temperature of 158°C, the polyethylene solution was extruded from the die in a sheet form, and then the above-mentioned extrudate was cooled in a water bath at 18°C, and a water flow was set on the surface of the water bath, so that from the water bath The mixed solvent discharged from the gelled sheet and suspended on the water surface was not reattached to the sheet, and a gel-like sheet (base tape) was produced. The b...

Embodiment 3

[0114] A polyethylene composition obtained by mixing 18 parts by mass of high molecular weight polyethylene (PE1) with a weight average molecular weight of 4.6 million and 5 parts by mass of low molecular weight polyethylene (PE2) with a weight average molecular weight of 560,000 was used. It was mixed with a previously prepared mixed solvent of 75.9 parts by mass of liquid paraffin and 1.1 parts by mass of decalin (decalin) so that the concentration of the total amount of the polyethylene resin was 23% by mass to prepare a polyethylene solution.

[0115] At a temperature of 156 ° C, the polyethylene solution was extruded from the die in a sheet form, and then the extrudate was cooled in a water bath at 18 ° C, and a water flow was set on the surface of the water bath, so that from the water bath The mixed solvent discharged from the gelled sheet and suspended on the water surface was not reattached to the sheet, and a gel-like sheet (base tape) was produced. The base tape was...

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Abstract

An object of the invention is to provide a base material for a liquid filter. The base material has high liquid permeability and high fine particle collecting property under high pressure although itis a film. The base material for the liquid filter that contains a polyolefin microporous membrane, in which a mean flow pore size dpp in a pore size distribution of the polyolefin microporous membrane measured by a half dry method according to gas-liquid phase substitution is from 1 nm to 20 nm, a mean flow pore size dLLP in a pore size distribution of the polyolefin microporous membrane measuredby a half dry method according to liquid-liquid phase substitution is from 1 nm to 15 nm, a difference (dpp-dLLP) between the mean flow pore size dpp and the mean flow pore size dLLP is 12 nm or less, and a thickness of the polyolefin microporous membrane is from 4 to 25 microns.

Description

technical field [0001] The present invention relates to a substrate for liquid filters. Background technique [0002] In recent years, the miniaturization and high performance of electronic equipment have been progressing day by day. In particular, digital equipment and mobile terminals represented by personal computers and smartphones are making great progress. As we all know, technological innovation in the semiconductor industry has played a major role in various technologies leading and supporting this progress. In the semiconductor industry in recent years, in terms of wiring pattern size, there has been a trend of development competition in the field of less than 20nm, and companies are rushing to establish state-of-the-art production lines. [0003] A photolithography (lithography) process is a process of forming a pattern in the manufacture of a semiconductor component. With the miniaturization of patterns in recent years, not only the properties of the chemical li...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C08J9/28C08J5/18C08L23/06
CPCC08J5/18C08J9/286C08J2323/06C08J2201/0502C08J2423/06B01D2325/02833B01D71/261B01D69/107B01D2325/341B01D69/02B01D2325/20B01D2325/04Y02E60/10H01L21/67017B01D2325/02832B01D2201/32B01D2323/12
Inventor 岩井亚由美古谷幸治大野隆央
Owner TEIJIN LTD