Magnetic-conductive guiding structure of Hall ion source
A Hall ion source and magnetic conductivity technology, applied in the field of ion source, can solve the problems of increasing the cost of electricity, increasing the cost of equipment purchase and installation, increasing the production cost of enterprises, etc., and achieves the effects of avoiding interference, simple structure and low production cost.
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[0022] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0023] Such as Figure 1-3 As shown, the embodiment provided by the present invention is a magnetic conduction and current conduction structure of a Hall ion source, which includes an inlet insulating bowl 10, an air passing magnetic disk 20, and an air outlet magnetic conducting bowl 30 arranged in sequence from bottom to top. A lower chamber 61 is provided between the gas-insulating bowl 10 and the air-conducting disk 20 , and an upper chamber 62 is provided between the air-conducting disk 20 and the air-conducting magnetic bowl 30 .
[0024] The intake insulation bowl 10 is provided with an air inlet 11 communicating with the lower chamber 61, the air-conducting magnetic disk 20 is provided with an air-passing hole 21 communicating with the lower chamber 61 and...
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