Quick loading and unloading tube furnace

Abstract

The invention provides a tube furnace capable of quickly loading and unloading a material. The tube furnace comprises a quartz boat, a sealing flange, a furnace tube and a clamp, wherein the quartz boat is a semicircular columnar groove body; the two end faces of the quartz boat are each provided with a circular ring; each circular ring is connected with a chain; the other end of each chain is connected with a metal bolt; the position, close to the center, of the sealing flange is provided with a circular hole; the outer wall of one end of the furnace tube is provided with a window; the windowis sealed by a cover plate and is used for loading and unloading the material; the quartz boat is positioned inside the furnace tube; the movement of the quartz boat inside the furnace tube is controlled by the chains at the two ends of the quartz boat; and the clamp is used for fixing the cover plate to the window of the furnace tube. The tube furnace provided by the invention is simple, easy toimplement, convenient to operate, compatible to a traditional tube furnace and high in feasibility.

Description

technical field [0001] The invention belongs to the field of material processing, and in particular refers to a tube furnace that can quickly load and unload materials. The wear and tear caused by the tube furnace can be realized at the same time as fast loading and unloading. Background technique [0002] Tube furnace has many advantages such as simple operation, reliable operation, stable control, convenient adjustment, strong anti-interference ability, and low price. It is widely used in semiconductors, nanomaterials, graphene, carbon fiber and other new materials and new processes. At present, most of the tube furnaces on the market adopt the intermittent manual loading and unloading design. When charging, first remove the vent pipe on the sealing flange at one end of the furnace tube, and at the same time remove the sealing flange at this end, put the sample to be processed into the quartz boat and put the quartz boat into the furnace tube, and then put the sealing met...

AI Technical Summary

Problems solved by technology

[0003] From the above content, it can be seen that the sealing flange and the ventilation pipe need to be removed twice for each loading and unloading, and the operation process is very complicated and time-consuming

At the same time, the sealing flange and the ventilation pipe are fixed by screws, and repeated removal and installation will cause wear and tear on the material

Using a metal push-pull rod to push the quartz boat into the furnace tube, the strength is not easy to grasp, accidentally causing the quartz boat to tilt, affecting the samples to be processed; and the push-pull designated position is marked by the push-pull rod, which is not easy to control

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