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Multi-component heat-release pyroelectricity sensitive element for multi-type gas sensing

A technology of gas sensing and sensitive components, which is applied in the field of infrared gas sensing, can solve problems such as unfavorable batch preparation and complex high-integration process, and achieve the effects of reducing device size, reducing device volume, and improving device integration

Active Publication Date: 2018-11-13
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Problems solved by technology

[0005] In view of the above existing problems or deficiencies, in order to solve the problems of device miniaturization, high integration process complexity and unfavorable batch preparation caused by the filter in the existing infrared gas detection sensitive components; the present invention provides a multi-type gas transmission Sensitive multi-element pyroelectric sensor

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  • Multi-component heat-release pyroelectricity sensitive element for multi-type gas sensing

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Embodiment Construction

[0016] In order to make the purpose, scheme and advantages of the present invention clearer, the present invention will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0017] figure 1 A side cross-sectional view of a single sensor element showing multi-element pyroelectric sensing elements for multi-type gas sensing, including 101 lower electrode, 102 pyroelectric material, 103 upper electrode, 104 dielectric layer, 105 top metal pattern layer.

[0018] The lower electrode 101 is used to lead out the change of the electric signal of the pyroelectric unit; the gold electrode prepared by electron beam evaporation completely covers the entire scope of the pyroelectric material. The metal film of the gold electrode has poor adhesion. Before the preparation, a layer of chromium metal film is plated as an adhesion layer to improve the adhesion of gold. Therefore, layer 101 of this embodiment is composed of two layers ...

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Abstract

The invention belongs to the technical field of infrared gas sensing, and specifically relates to a multi-component pyroelectricity sensitive element for multi-type gas sensing. The multi-component heat-release pyroelectricity element for multi-type gas sensing is characterized in that an infrared sensing unit is designed; a bottom metal layer of a second structural layer M-I-M metamaterial material is used as an upper electrode of a first structural layer; a top metal graphic layer of the second structural layer is processed by sectioning graphing, and thus the multi-sensitive components on asingle pyroelectricity material are integrated, a plurality of infrared wave sections are absorbed, and various types of gas are responded. According to the element, the pyroelectricity sensitive material and the metamaterial material perfect wave absorbing structure are combined and used in gas sensing; the sensing element is high in infrared selectivity; a filter sheet component in an existinginfrared gas sensor is saved, so that the size of the device is reduced; the device integrity is improved; and massive manufacturing is realized.

Description

technical field [0001] The invention belongs to the technical field of infrared gas sensing and relates to an infrared sensitive element, in particular to a multi-element pyroelectric sensitive element for multi-type gas sensing. Background technique [0002] In the infrared gas detection element, the detection unit usually consists of a sensitive element (pyroelectric material) and its upper and lower electrodes, infrared absorption layer and filter. Infrared light passes through the filter and is absorbed by the infrared absorbing layer, causing the temperature of the pyroelectric material to rise and the electrical signal to change, which is drawn out from the upper and lower electrodes to achieve infrared detection. The usual infrared absorbing layer cannot select the wavelength of infrared light, and can make it respond in a wide range of wavelengths, but it often only needs infrared light of a certain band in application. Therefore, when making devices, infrared light...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/3504
CPCG01N21/3504
Inventor 罗文博张开盛吴传贵帅垚张万里
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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