Check patentability & draft patents in minutes with Patsnap Eureka AI!

A multi-element pyroelectric sensitive element for multi-type gas sensing

A technology of gas sensing and sensitive components, which is applied in the field of infrared gas sensing, can solve problems such as unfavorable batch preparation and complex high-integration process, and achieve the effects of reducing device size, reducing device volume, and improving integration

Active Publication Date: 2020-09-25
UNIV OF ELECTRONICS SCI & TECH OF CHINA
View PDF5 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of the above existing problems or deficiencies, in order to solve the problems of device miniaturization, high integration process complexity and unfavorable batch preparation caused by the filter in the existing infrared gas detection sensitive components; the present invention provides a multi-type gas transmission Sensitive multi-element pyroelectric sensor

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A multi-element pyroelectric sensitive element for multi-type gas sensing
  • A multi-element pyroelectric sensitive element for multi-type gas sensing
  • A multi-element pyroelectric sensitive element for multi-type gas sensing

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0016] In order to make the purpose, scheme and advantages of the present invention clearer, the present invention will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0017] figure 1 A side cross-sectional view of a single sensor element showing multi-element pyroelectric sensing elements for multi-type gas sensing, including 101 lower electrode, 102 pyroelectric material, 103 upper electrode, 104 dielectric layer, 105 top metal pattern layer.

[0018] The lower electrode 101 is used to lead out the change of the electric signal of the pyroelectric unit; the gold electrode prepared by electron beam evaporation completely covers the entire scope of the pyroelectric material. The metal film of the gold electrode has poor adhesion. Before the preparation, a layer of chromium metal film is plated as an adhesion layer to improve the adhesion of gold. Therefore, layer 101 of this embodiment is composed of two layers ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
Login to View More

Abstract

The invention belongs to the technical field of infrared gas sensing, in particular to a multi-element pyroelectric sensitive element for multi-type gas sensing. In the present invention, by designing a single infrared sensitive unit, the underlying metal layer of the M-I-M metamaterial structure of the second structural layer is simultaneously used as the upper electrode of the first structural layer. By partitioning and patterning the top metal pattern layer of the second structure layer, the integration of multiple sensitive elements on a single pyroelectric material, the absorption of multiple infrared bands, and the response of multiple gas types are realized. The invention combines the pyroelectric sensitive material with the perfect wave-absorbing structure of the metamaterial, and applies it to gas sensing, directly realizes the high infrared selectivity of the sensitive element, omits the filter parts in the existing infrared gas sensor, and reduces the device volume , improve device integration, and facilitate mass production.

Description

technical field [0001] The invention belongs to the technical field of infrared gas sensing and relates to an infrared sensitive element, in particular to a multi-element pyroelectric sensitive element for multi-type gas sensing. Background technique [0002] In the infrared gas detection element, the detection unit usually consists of a sensitive element (pyroelectric material) and its upper and lower electrodes, infrared absorption layer and filter. Infrared light passes through the filter and is absorbed by the infrared absorbing layer, causing the temperature of the pyroelectric material to rise and the electrical signal to change, which is drawn out from the upper and lower electrodes to achieve infrared detection. The usual infrared absorbing layer cannot select the wavelength of infrared light, and can make it respond in a wide range of wavelengths, but it often only needs infrared light of a certain band in application. Therefore, when making devices, infrared light...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/3504
CPCG01N21/3504
Inventor 罗文博张开盛吴传贵帅垚张万里
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com