Detection method of scanning probe microscope with magnetic-electric signal detection function

Abstract

The invention provides a detection method of a scanning probe microscope with a magnetic-electric signal detection function; the method comprises the following steps: using a contact mode to simultaneously obtain a sample morphology signal and a conductive signal or morphology and piezoelectric signals in one scanning process, carrying out secondary scanning, and using a non-contact mode to obtaina sample magnetic signal. Compared with the prior art, the detection method simplifies a detection process, can effectively realize sample electricity characteristics that include a conductive characteristic and a piezoelectric characteristic and magnetic symptoms, can reduce a detection cost, and can improve the detection precision. In addition, the method preferably imports a Kelvin controllerin the scanning probe microscope system so as to eliminate electrostatic force, thus effectively preventing sample surface electromotive force interference in magnetic signal measurements, and improving test accuracy.

Description

technical field [0001] The invention relates to a scanning probe microscope with the function of measuring magneto-electric signals. Background technique [0002] The explosive growth of the current information volume puts forward higher requirements on the memory. As one of the most potential memories, magnetoelectric random access memory has advantages in terms of stability and low power consumption. In magnetoelectric random access memory, how to effectively use ferroelectric materials to effectively control the magnetic moment of the ferromagnetic layer is one of the important contents of its research. To this end, it is necessary to find a means to effectively characterize the magnetic and electrical properties, including conductivity and piezoelectricity. [0003] Scanning probe microscopy (SPM) uses the interaction force between the sample and the nanoprobe to detect the basic physical properties of the sample (such as morphology, magnetism, piezoelectricity, etc.),...

AI Technical Summary

Problems solved by technology

Although this detection method is simple, there is a problem of too many scan times for the measurement of the magnetic properties and electrical properties of materials in the same micro-nano scale range. The electrical properties of the sample also require directional scanning. On the one hand, the scanning is cumbersome and the detection cost is high. On the other hand, it is difficult to suppress the sample drift under the condition of multiple scanning, which affects the measurement accuracy.

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