Magneto-optic photoluminescence photo reflectance and light modulated transmission spectrum joint testing system

Abstract

The invention discloses a magneto-optic photoluminescence photo reflectance and light modulated transmission spectrum joint testing system. The system comprises a broadband infrared source and Fouriertransform component, a low-temperature high-intensity magnetic field system, a reflecting / transmitting light path sub-module, a pump / modulation dual-purpose AC output laser and a guide light path thereof, a computer controlled multifunctional spectrum test switching component, a spectral signal detection and demodulation module and a computer, wherein the low-temperature high-intensity magnetic field system comprises an infrared optical window; the reflecting / transmitting light path sub-module is used for broadband light incidence and collection; the computer controls the system operation. The system disclosed by the invention can realize combined measurement of magneto-optic photoluminescence, photoreflectance and light modulation transmission aiming at the same specific light spot position of a semiconductor material, and reliable contrast of different magnetic field spectrum characteristics of materials is formed. The system disclosed by the invention has the advantages of being comprehensive, nondestructive and high in sensitivity, and is very applicable to spectroscopic detection of the optical property of the semiconductor, electronic structure and magnetic effect characteristics.

Description

Technical field: [0001] The invention relates to a multi-modulation spectrum combined testing optical system. It specifically concerns the combined testing of magneto-optical photoluminescence, light-modulated reflectance, and light-modulated transmission. It is mainly based on laser pumping / modulation for low temperature and strong magnetic field environment, common optical focus coupling of reflection and transmission light paths, through a series of mirrors combined spectrum switching components, combined with step-scan Fourier transform spectral detection and phase-sensitive detection technologies, Realize the joint test of magneto-optical photoluminescence, light-modulated reflection and light-modulated transmission. It can be used to measure the multi-dimensional magneto-optical spectral characteristics of semiconductor materials, so as to characterize the parameters that determine the optical, electrical and magnetic properties of materials (such as band gap, defect en...

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Problems solved by technology

[0004] However, at present, PL, PR and PT are tested as independent spectroscopic techniques in semiconductor testing, which are easily affected by the spatial position of samples, especially samples with poor electronic structure uniformity, resulting in different measurement techniques. On the other hand, PL, PR and PT are not combined with the magnetic field to form magneto-optical spectroscopy technology, which lacks the information related to the magnetic field of the material studied, which leads to the failure to decipher some intrinsic information of the photoelectric properties of the material. , so that the mechanism analysis of related materials and devices is limited

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