Electrode Resonant Micro Gyro

Abstract

The invention provides an electrode resonant micro-gyroscope, comprising a base body (1) and a resonator body (2); the resonator body (2) is arranged on the base body (1); the base body (1) has an accommodating cavity (4) ; The resonator (2) is arranged in the accommodation cavity (4). The bottom of the resonator (2) extends out of the fixing part (3); the accommodating cavity (4) is provided with a fixing part accommodating groove; the fixing part (3) is matched with the fixing part accommodating groove; the fixing part ( 3) It is fixed in the receiving groove of the fixing part. The processing technology provided by the present invention is a planar micro-processing technology, which is convenient for processing and is conducive to mass production; the bottom support column is formed by corroding the silicon dioxide sacrificial layer, the size of the support column can be precisely controlled, and the self-symmetry of the structure can be realized.

Description

technical field [0001] The invention belongs to the field of micro-electromechanical technology, and in particular relates to an electrode resonant micro-gyroscope, in particular to a nickel-electrode hemispherical resonant micro-gyroscope. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro-gyroscope based on micro-electro-mechanical system (Micro-Electro-Mechanical System, MEMS) technology is processed by micro-nano batch manufacturing technology, and its cost, size, and po...

AI Technical Summary

Problems solved by technology

[0004] This patent document has the following disadvantages: the volume of the solid wave gyro cup-shaped resonator is too large, which limits its application in many conditions where the volume must be small; the piezoelectric electrodes of the cup-shaped vibrator chassis are bonded to the cup-shaped vibrator. There is a possibility of falling off under high-frequency vibration, and the reliability is not high; the processing technology of the gyroscope is relatively complicated, the processing cost is high, and it is not suitable for mass production; Larger, the quality factor is difficult to improve; the gyro fixing method is unstable, and it is difficult to adapt to occasions that require high reliability

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