Flexible resistive-type pressure sensor array and preparation method therefor

A resistive pressure sensor array technology, applied in the direction of measuring fluid pressure through electromagnetic elements, measuring fluid pressure, instruments, etc., can solve the problems of increasing the control burden of back-end circuits, complex and difficult preparation processes, and small array scale, and achieves rapid Response and recovery, simple fabrication process, effects at large array scale

Pending Publication Date: 2018-11-23
ZHEJIANG UNIV
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Problems solved by technology

[0008] Although the existing flexible resistive pressure sensor array technology can realize distributed pressure measurement, it has obvious deficiencies in sensitivity, response and recovery time or preparation process; in addition, arrays using redundant line array technology have small array size , the disadvantage of many leads; the scan circuit row and column need gates, which will increase the control burden of the back-end circuit; the array prepared by thin film transistor technology has the disadvantages of complicated and difficult preparation process, high cost and high working voltage

Method used

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  • Flexible resistive-type pressure sensor array and preparation method therefor
  • Flexible resistive-type pressure sensor array and preparation method therefor
  • Flexible resistive-type pressure sensor array and preparation method therefor

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Embodiment Construction

[0042] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0043] Such as figure 1 , figure 2 As shown, a flexible resistive pressure sensor array is laminated by a 4-layer structure, including a top packaging layer 1, a functional layer 2, an electrode layer 3 and a bottom packaging layer 4 from top to bottom.

[0044] The functional layer 2 includes a layer of flexible elastic film 11, one side of the film has raised microstructures, and metal thin films 12 are arranged at equal intervals on the side with raised mic...

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Abstract

The invention discloses a flexible resistive-type pressure sensor array and a preparation method therefor. The flexible resistive-type pressure sensor array comprises a surface packaging layer, an electrode layer and a functional layer, wherein the electrode layer comprises a base film and a plurality of thin film metal wires arranged on the base film at equal intervals. The thin film metal wiresare connected with a multi-way gate. The functional layer is a flexible elastic film with a convex microstructure on the surface, and the flexible elastic film is covered by a plurality of conductivemetal wires arranged at equal intervals, wherein the conductive metal wires are connected with an operational amplifier. The thin film metal wires of the electrode layer and the conductive metal wiresof the functional layer are stacked and assembled in a vertical crossing manner. The pressure sensor array provided by the invention has a series of advantages, such as high sensitivity, fast response and recovery, low operating voltage, large array scale, simple preparation process, and low cost.

Description

technical field [0001] The invention relates to the field of pressure sensors, in particular to a flexible resistive pressure sensor array and a preparation method thereof. Background technique [0002] Different from traditional rigid devices, flexible devices are flexible and elastic, and can withstand multiple deformations. Flexible pressure sensors have a wide range of applications in medical health, human-computer interaction, and robotic electronic skin. [0003] According to the conduction mechanism, flexible pressure sensors are mainly divided into three types: resistive, capacitive and piezoelectric. Among them, the resistive pressure sensor has been extensively studied because of its simple structure and high sensitivity. Its mechanism is to convert the external pressure stimulus into a change in resistance, thereby causing a change in the output current or voltage to feedback the magnitude of the pressure. [0004] At present, the technologies for realizing flexi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/20G01L9/00
CPCG01L1/20G01L9/0051
Inventor 蔡民杜以朴宋吉舟聂爽王成军张顺岑诺钟雯祎邓四维
Owner ZHEJIANG UNIV
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