A method for rapidly preparing ultra-thin ceramic sheets

A special ceramic, ultra-thin technology, applied in metal material coating process, coating, gaseous chemical plating and other directions, can solve problems such as a single ultra-thin ceramic sheet, to expand the application mode and scope, short production cycle, prospects huge effect

Active Publication Date: 2020-11-27
WUHAN XINGUI TECH QIANJIANG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

On the whole, at present, the ceramic thin film prepared by LVCD technology is generally combined with the corresponding substrate as a functional layer, and there is no direct report on a complete and single ultra-thin ceramic sheet.

Method used

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  • A method for rapidly preparing ultra-thin ceramic sheets
  • A method for rapidly preparing ultra-thin ceramic sheets

Examples

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Effect test

Embodiment 1

[0034] The method for rapidly preparing ultra-thin AlN special ceramic sheets with a thickness of 500 μm on a graphite substrate with a thickness of 50 mm by using LCVD technology is as follows:

[0035] (1) Clean and dry the graphite substrate according to the above method, place it on the heating platform substrate base of the laser chemical vapor deposition device, extract the vacuum to below 800Pa, and then preheat the substrate to 773K. Take appropriate amount of Al(acac) 3 (Aluminum triacetylacetonate) was dissolved in 200 mL of tetrahydrofuran solvent, and the resulting solution was added to the raw material tank.

[0036] (2) Turn on the laser, set the output power to 180W, and the continuous Nd:YAG laser (wavelength: 1064nm) irradiates the surface of the substrate through the quartz window of the equipment, forming a spot of about 25mm. The temperature of the substrate is measured in real time through the thermocouple on the back of the heating stage. After the tempe...

Embodiment 2

[0040] The method of quickly preparing SiC ultra-thin special ceramic sheets with a thickness of 450 μm on a graphite substrate with a thickness of 100 mm by using LCVD technology is as follows:

[0041] (1) Firstly, the graphite substrate was placed in acetone, absolute ethanol, and deionized water for 20 minutes by ultrasonic vibration cleaning, and then the cleaned substrate was fully dried in an oven. Put the cleaned graphite substrate on the heating platform substrate seat of the laser chemical vapor deposition device, vacuumize to reduce the pressure to below 800Pa, and then preheat the substrate to 773K. Take an appropriate amount of hexamethyldisilane (C 6 h 18 Si 2 ) was dissolved in about 200 mL of tetrahydrofuran (Tetrahydrofuran; THF) solvent, and the resulting solution was added to the raw material tank.

[0042] (2) Turn on the laser, set the output power to 180W, and the continuous Nd:YAG laser (wavelength is 1064nm) shines on the surface of the substrate thr...

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Abstract

The invention relates to a method for quickly preparing an ultrathin ceramic chip. The method comprises the following steps: utilizing a laser chemical vapor deposition technique to take a corresponding metallic organic source as a precursor raw material and deposit a uniform ceramic layer on a specific substrate under an activating effect of laser, and then separating the substrate from the prepared ceramic layer in the manner of ablating or grinding, thereby acquiring a single high-compactness specific ultrathin ceramic chip. The method not only can greatly reduce the sintering temperature of the ceramic chip and is beneficial to reducing energy consumption, but also is simple in posttreatment process, short in production period, lower in cost and huge in application prospect in the aspect of industrial production.

Description

technical field [0001] The invention relates to the technical field of ceramic materials, in particular to a method for rapidly preparing ultra-thin ceramic sheets. Background technique [0002] Special ceramics refer to ceramics with special mechanical, physical or chemical properties, which have been widely used in various modern industries and cutting-edge science and technology. Special ceramics usually have one or more functions, such as single functions such as electricity, magnetism, light, heat, sound, chemistry, and biology, as well as coupling functions such as piezoelectricity, pyroelectricity, electro-optic, acousto-optic, and magneto-optic. The cornerstone of cutting-edge technologies such as aerospace, energy, machinery, electronic information and bioengineering. In the development of science and technology in the 21st century, the research on special ceramics has occupied a very important position. [0003] The raw materials and production technology used in...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/01C23C16/40C23C16/34C23C16/32C23C16/48
CPCC23C16/01C23C16/32C23C16/34C23C16/40C23C16/483
Inventor 赵培吴慰
Owner WUHAN XINGUI TECH QIANJIANG CO LTD
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