Broadband reflective half-wave plate based on silicon nano brick array and preparation method of broadband reflective half-wave plate
A silicon nano-brick and half-wave plate technology, applied in the fields of micro-nano optics and polarized optics, can solve the problems of phase delay of polarized light, complicated manufacturing process, large volume and weight, etc., and achieves low weight, simple processing and low cost. Effect
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[0031] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0032] see figure 1 As shown, the embodiment of the present invention provides a broadband reflective half-wave plate based on a silicon nanobrick array, which includes a substrate 4, a metal reflective layer 3, a dielectric film layer 2 and a silicon nanobrick array arranged from bottom to top 1, wherein the silicon nanobrick array 1 is composed of silicon nanobricks arranged periodically in the same direction and size.
[0033] see figure 2 As shown, the silicon nanobrick is in the shape of a cuboid, and its length, width, and height are both subwavelength dimensions. L is the long axis dimension of the silicon nanobrick, W is the short axis dimension of the silicon nanobrick, H is the height of the silicon nanobrick, and CS is the period of silicon nanobrick array 1.
[0034] Preferably, the substrate 4 is made of glass materia...
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