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Rotational device for large-aperture optical flat mirrors for absolute detection

A technology of rotating device and optical plane, applied in the field of optical measurement, to achieve the effect of simple operation process and simple device structure

Active Publication Date: 2020-05-05
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
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AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the problem of large-diameter optical plane rotation in the absolute detection process, and propose a rotating device for large-diameter optical planes in absolute detection. Drive the entire plane mirror to rotate on a chain composed of several cylindrical plastic rollers, which is suitable for the rotation of large-diameter plane mirrors in the absolute detection process

Method used

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  • Rotational device for large-aperture optical flat mirrors for absolute detection

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Embodiment Construction

[0017] The present invention will be further described below in conjunction with drawings and embodiments.

[0018] figure 1 It is a structural diagram of the rotating device used for absolute detection of medium and large-diameter optical planes according to the present invention. It can be seen from the figure that the device of the present invention includes a lifting and rotating mechanism, a hoisting and rotating mechanism and a mirror frame;

[0019] The picture frame is composed of a rear plate 9 and a front plate 10 parallel to each other and connected by a plurality of limit connecting rods 15 around;

[0020] The lifting and rotating mechanism includes a wing nut 1, a first flat plate 2, a support rod 3, a supporting flat plate 4, a rotating hand wheel 5, a soft-toothed synchronous belt 6, a base plate 7 and a rotating shaft 8; the first flat plate 2 , the supporting plate 4 and the bottom plate 7 are linked together through a plurality of supporting rods 3 parallel...

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Abstract

A rotating device for a large aperture optical plane in absolute detection is disclosed. The device comprises a lifting rotary mechanism, a suspending rotary mechanism and a mirror frame. The liftingrotary mechanism is fixed on a top part of the mirror frame through a bottom plate, the suspending rotary mechanism is connected to the lifting rotary mechanism through a soft tooth synchronization belt, and the suspending rotary mechanism is also connected to the mirror frame through a load bearing steel wire. In the rotating device, friction between the soft tooth synchronization belt and a sideface of the large aperture optical flat mirror is used to drive the entire flat mirror to rotate on a chain consisting of a number of cylindrical plastic rolling wheels. Via the device disclosed in the invention, the large aperture optical flat mirror with a diameter greater than 300 mm can be rotated at any angle, and the device is suitable for realizing the rotation of the large aperture flat mirror in processes of absolute detection of the large aperture and high precision optical plane.

Description

technical field [0001] The invention belongs to the field of optical measurement, in particular to a rotating device for a large-diameter optical plane mirror used for absolute detection. Background technique [0002] With the continuous development of science and technology, driven by projects such as astronomy and space optics, inertial confinement fusion devices, wind laser radar, and deep ultraviolet and extreme ultraviolet lithography machines, modern optical component manufacturing technology is moving toward multi-functional and precise With the development of large or even giant optical systems with characteristics, the demand for high-precision optical components is increasing. [0003] The traditional large-aperture optical plane detection method mainly uses the interferometric relative measurement method. The detection accuracy of this method is restricted by the accuracy of the reference surface shape of the interferometer itself, especially when the PV of the la...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00
CPCG01B11/00
Inventor 刘世杰周游白云波潘靖宇王微微吴福林邵建达
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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