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Deposition system, deposition apparatus, and method of operating a deposition system

A technology of deposition system and deposition area, applied in the field of deposition system

Active Publication Date: 2021-01-15
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

During this idle period there may be a risk that the walls of the vacuum processing chamber may be coated with evaporated material ("sprinkle coating")

Method used

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  • Deposition system, deposition apparatus, and method of operating a deposition system
  • Deposition system, deposition apparatus, and method of operating a deposition system
  • Deposition system, deposition apparatus, and method of operating a deposition system

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Embodiment Construction

[0021] Reference will now be made in detail to various embodiments of the present disclosure, one or more examples of which are illustrated in the drawings. In the following description of the drawings, the same reference numerals denote the same components. Hereinafter, differences between individual embodiments will be described. Each example is provided by way of illustration of the disclosure and is not intended to limit the disclosure. Furthermore, features illustrated or described as part of one embodiment can be used on or combined with other embodiments to yield a further embodiment. It is intended that this description cover such modifications and variations.

[0022] Figure 1A is a schematic diagram of a deposition system 100 according to embodiments described herein. Deposition system 100 includes a vapor source 120 having one or more vapor outlets 125 . The vapor source 120 is located in the deposition position (II) for coating the substrate 10 . In the depos...

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Abstract

A deposition system (100) for depositing evaporated material on a substrate is described. A deposition system (100) includes a vapor source (120) having one or more vapor outlets (125); a shield (110); and a cooling device (112) for cooling the shield, wherein the vapor source (120) is movable To the unloaded position (I), one or more steam outlets (125) are directed towards the shield (110) in the unloaded position. Furthermore, a deposition apparatus (1000) having a deposition system (100) and a method of operating the deposition system are described.

Description

technical field [0001] The present disclosure relates to several deposition systems configured for depositing evaporated material, particularly evaporated organic material, on one or more substrates. Various embodiments of the present disclosure further relate to a deposition device having a deposition system for depositing evaporated material on a substrate. Other embodiments relate to methods of operating a deposition system, particularly for depositing evaporated material on a substrate in a vacuum processing chamber. Background technique [0002] Organic evaporators are tools used in the manufacture of organic light emitting diodes (OLEDs). OLEDs are a specific type of light emitting diodes. In OLEDs, the light emitting layer includes thin films of certain organic compounds. Organic Light Emitting Diodes (OLEDs) are used in the manufacture of television screens, computer monitors, mobile phones, and other handheld devices for displaying information, for example. OLED...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24C23C14/56H01L51/00H10K99/00
CPCC23C14/24C23C14/564H10K71/164C23C14/12H10K99/00C23C14/042C23C14/541
Inventor 斯蒂芬·班格特马蒂亚斯·克雷布斯
Owner APPLIED MATERIALS INC