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A method and apparatus for simulating a metal mask

A metal mask and simulation method technology, applied in the field of metal mask simulation methods and devices, can solve the problems of increasing design cost and increasing development cycle, and achieve the effect of saving design cost and shortening the development cycle

Pending Publication Date: 2018-12-14
BOE TECH GRP CO LTD
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

However, the method of physical testing will not only greatly increase the design cost, but also increase the development cycle

Method used

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  • A method and apparatus for simulating a metal mask
  • A method and apparatus for simulating a metal mask
  • A method and apparatus for simulating a metal mask

Examples

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Embodiment Construction

[0044] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention. It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined arbitrarily with each other.

[0045] At present, the production of metal masks usually adopts the wet etching method that can be stably mass-produced, and the openings formed by the wet etching process have a trapezoidal opening cross-section, and the thickness and shape of the opening cross-section are not uniform. . Wherein, the cross-section of the opening refers to a plane parallel to the axis of the opening. image 3 is a schematic diagram of the opening on the surface of the metal mask contacting the substrate, Figure 4 I...

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Abstract

Embodiments of the present invention provide a method and apparatus for simulating a metal mask. The method comprises the following steps: dividing the evaporation region of the metal mask into an n-layer plate model with n being 2-6; with n-layer plate model taken as a composite shell structure, carrying out the mechanical simulation through a finite element algorithm, and obtaining the simulation result. A metal mask is divided into a plurality of plate-shaped models, therefore, the model can accurately simulate the real structure of the metal mask, greatly save the design cost, shorten theproduct development cycle, and obtain accurate simulation results, which can be used to guide the design of the metal mask and the mesh stretching process design.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a simulation method and device for a metal mask. Background technique [0002] In the process of preparing an organic light emitting diode (Organic Light Emitting, OLED) display panel, it is necessary to vapor-deposit the materials of each layer of the OLED on the substrate, and a corresponding mask is used in the vapor-deposition process. The metal mask (Fine Metal Mask, FMM) is a mask used in the electroluminescence (EL) evaporation process, which is mainly used for evaporating organic light-emitting materials to form red R / green G / blue B pixels of the display panel. figure 1 is a schematic diagram of the structure of a metal mask, figure 2 for figure 1 Enlarged view of region B in the middle. Such as figure 1 and figure 2 As shown, a metal mask plate is used to vapor-deposit the effective display area of ​​multiple display panels, and the effective display area of ​​ea...

Claims

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Application Information

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IPC IPC(8): G06F17/50
CPCG06F2119/06G06F30/23Y02T90/00
Inventor 白珊珊
Owner BOE TECH GRP CO LTD
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