Sensitivity enhancement type optical fiber acoustic sensor probe and sensitivity enhancement structure thereof

A technology of sensor probes and sensitization structures, which is applied in the field of optical fiber sensing technology and acoustic wave detection, can solve problems such as unsatisfactory, and achieve the effects of low detection limit, simple structure and manufacturing process, and fewer parts

Active Publication Date: 2018-12-18
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In real life, there is a wide range of important application requirements for high-

Method used

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  • Sensitivity enhancement type optical fiber acoustic sensor probe and sensitivity enhancement structure thereof
  • Sensitivity enhancement type optical fiber acoustic sensor probe and sensitivity enhancement structure thereof
  • Sensitivity enhancement type optical fiber acoustic sensor probe and sensitivity enhancement structure thereof

Examples

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no. 1 example

[0057] In the first exemplary embodiment of the present invention, a sensitization-type fiber optic acoustic sensor probe and a sensitization structure thereof are provided. figure 1 It is a sectional view of the sensitization structure of the sensitization optical fiber acoustic sensor probe of the first embodiment of the present invention; figure 2 It is a sectional view of the probe of the intensified optical fiber acoustic sensor according to the first embodiment of the present invention.

[0058] like figure 1 As shown, the sensitization structure 1 of the sensitization optical fiber acoustic sensor probe of this embodiment includes a first casing 10, a first diaphragm 11 and a second diaphragm 12, wherein the first casing 10 has a first port and a second Two ports, and the size of the first port is larger than the second port, the first diaphragm 11 is tightly covered on the first port, the second diaphragm 12 is tightly covered on the second port, and the second diaph...

no. 2 example

[0080] In the second exemplary embodiment of the present invention, a sensitization-type fiber optic acoustic sensor probe and a sensitization structure thereof are provided. image 3 It is a sectional view of the sensitization structure of the sensitization optical fiber acoustic sensor probe of the second embodiment of the present invention; Figure 4 It is a cross-sectional view of the probe of the intensified optical fiber acoustic sensor according to the second embodiment of the present invention.

[0081] like image 3 As shown, the sensitization structure 1 of the sensitization optical fiber acoustic sensor probe of this embodiment is similar to that of the first embodiment, the difference is that:

[0082] In this embodiment, the sensitization structure 1 is a silicon-based or glass-based MEMS structural element, and the first housing 10 is formed by aligning and bonding a two-layer supporting structure provided with a first membrane 11 and a second membrane 12 respecti...

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Abstract

The invention discloses a sensitivity enhancement type optical fiber acoustic sensor probe and a sensitivity enhancement structure thereof. The sensitivity enhancement structure comprises a first shell, a first diaphragm and a second diaphragm, wherein the first shell is provided with a first port and a second port, and the size of the first port is greater than the size of the second port; the first diaphragm is tightened and arranged on the first port; the second diagram is tightened and arranged on the second port and is provided with a reflection surface, the central zone of the reflectionsurface and the end surface of an optical fiber are opposite, a gap is formed, and the deformation resistance ability of the second diaphragm is smaller than the deformation resistance ability of thefirst diaphragm; and a vibration transmission cavity is jointly formed by the first shell, the first diagram and the second diagram, the first diagram generates vibration through an induction sound signal, and the vibration is transferred to the second diagram through the vibration transmission cavity to cause gap changes so as to modulate an optical signal transferred by the optical fiber. By use of the sensitivity enhancement structure, probe sensitivity can be effectively enhanced, the signal-to-noise ratio of the probe is improved, and the sensitivity enhancement structure is especially suitable for the high-sensitivity low-noise detection of infrasonic wave.

Description

technical field [0001] The invention relates to the fields of optical fiber sensing technology and acoustic wave detection technology, in particular to a sensitivity-increasing optical fiber acoustic sensor probe and a sensitivity-increasing structure thereof. Background technique [0002] Traditional acoustic sensors are electrical quantity sensors, which are mainly divided into two categories, capacitive and piezoresistive, but these two acoustic sensors are susceptible to electromagnetic interference, have low sensitivity, and have complex manufacturing processes. Compared with the electrical volume acoustic sensor, the optical fiber acoustic sensor has strong anti-electromagnetic interference ability, high sensitivity, wide detection spectrum range, low optical signal transmission loss, good compatibility with optical fiber communication network, and is more suitable for working in complex electromagnetic environments and severe weather conditions and network detection. ...

Claims

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Application Information

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IPC IPC(8): G01H9/00
CPCG01H9/004
Inventor 祁志美张萌颖高然吴高米任迪鹏
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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