A method and device for adjusting imaging parameters of an electron microscope
An electron microscope and imaging parameter technology, applied in image data processing, image analysis, image enhancement, etc., can solve the problems of low efficiency of imaging parameter adjustment and long time required for clear image adjustment, so as to improve adjustment efficiency, reduce usage and Maintenance cost and the effect of shortening the required time
Active Publication Date: 2020-10-16
NEW H3C BIG DATA TECH CO LTD
View PDF5 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0004] In view of this, the purpose of the present disclosure is to provide a method and device for adjusting imaging parameters of an electron microscope, which is used to solve the problem in the prior art that it takes a long time to adjust a clear image, resulting in low efficiency in adjusting imaging parameters
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0051] In order to make the purpose, technical solutions and advantages of the embodiments of the present disclosure clearer, the technical solutions in the embodiments of the present disclosure will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only It is a part of the embodiments of the present disclosure, but not all of them. The components of the disclosed embodiments generally described and illustrated in the figures herein may be arranged and designed in a variety of different configurations. Accordingly, the following detailed description of the embodiments of the present disclosure provided in the accompanying drawings is not intended to limit the scope of the claimed disclosure, but merely represents selected embodiments of the present disclosure. Based on the embodiments of the present disclosure, all other embodiments obtained by those ski...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention provides a method and a device for adjusting imaging parameters of an electron microscope, which are applied to an electron microscope EM. The method comprises the following steps: EM obtaining a first parameter of a preparation stage before performing imaging, inputting the first parameter into a first imaging model corresponding to the EM obtained by training in advance, and obtaining a second parameter; imaging according to the first parameter of the preparation stage and the obtained second parameter to obtain a first image; extracting a third parameter from the obtained second parameter, inputting the third parameter into a second imaging model corresponding to the EM obtained by pre-training, and obtaining a fourth parameter; imaging according to the first parameter andthe third parameter of the preparation stage and the obtained fourth parameter to obtain a second image; determining imaging parameters of the EM based on the first image and the second image, and imaging according to the determined imaging parameters, which can effectively improve the adjustment efficiency of imaging parameters.
Description
technical field [0001] The present disclosure relates to the technical field of big data application, in particular, to a method and device for adjusting imaging parameters of an electron microscope (EM, Electron Microscope). Background technique [0002] EM is an optical instrument composed of a lens or a combination of several lenses, which is used to magnify a tiny object in order to obtain the microstructure information of the tiny object. Among them, the scanning electron microscope (SEM, Scanning Electron Microscope) has a maximum resolution of 1 nanometer (nm) and a continuously adjustable magnification between 20 and 200,000 times, which can image tiny objects beyond the limit of the optical microscope. And based on the image analysis of the imaging, it is widely used in the fields of biology, medicine, materials science, electronics, semiconductor industry and so on. [0003] When analyzing images imaged by the SEM, image quality, for example, image clarity, direct...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): G06T7/00G06K9/62
CPCG06T7/0002G06T2207/10061G06T2207/20081G06T2207/30168
Inventor 王伯丁李应成
Owner NEW H3C BIG DATA TECH CO LTD