A quartz tube air removal device for commercial epr/esr
A quartz tube and air cavity technology, applied in the field of quartz tube air removal devices, can solve the problems of troublesome operation, high cost, large consumption of helium, etc., and achieve the effects of convenient operation, reduced consumption and rapid removal
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[0015] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0016] like figure 1 As shown, a quartz tube air removal device for commercial EPR / ESR includes a ventilation cavity 8, one side of the ventilation cavity 8 is communicated with the dry vacuum pump 1 through the first vacuum valve 4, and the ventilation cavity 8 is connected to the first vacuum valve 4. A vacuum pressure gauge 5 is connected to a bypass between the vacuum valves 4, the other side of the ventilation chamber 8 communicates with the gas cylinder 20 through the second vacuum valve 17, and the side between the ventilation chamber 8 and the second vacuum valve 17 A safety valve 14 is connected to the gas exchange chamber. The top and bottom of the ventilation chamber 8 are respectively provided with through holes communicating with the chamber. 11, and the top of the ventilation cavity 8 is provided with a sealing fixture for fixing the quar...
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