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Diffractive optical element and optical device containing same

A diffractive optical element and optical surface technology, applied in optical elements, diffraction gratings, optics, etc., can solve the problems of harsh device processing conditions, small feature size, device application limitations, etc., and achieve the effect of wide applicable band range and enlarged angle

Inactive Publication Date: 2019-01-01
ZHUHAI MULTISCALE PHOTOELECTRIC TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, due to the constraints of existing design methods, this stepped diffraction device can only use the first-order diffraction, and the divergence angle of the diffraction pattern is determined by the characteristic size of the diffraction structure. Therefore, if a stepped diffraction device is used to obtain a large angle Diffraction patterns require extremely small feature sizes, which not only require harsh device processing conditions, but also the central zero-order diffracted light intensity is very sensitive to the error of the step processing depth and the wavelength of the incident light, and subtle depth errors or wavelength shifts will Introduces a strong central zero-order diffraction, which greatly limits the application of the device

Method used

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  • Diffractive optical element and optical device containing same
  • Diffractive optical element and optical device containing same
  • Diffractive optical element and optical device containing same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] see figure 1 , is a cross-sectional view of the diffractive optical element provided in Embodiment 1.

[0040] In this embodiment, the optical surface of the diffractive optical element is composed of continuous three-dimensional curved surface units, the three-dimensional curved surface unit is composed of three-dimensional convex curved surfaces, the material of the three-dimensional convex curved surfaces is optical plastic (PC), and each three-dimensional convex curved surface The size is 4 microns and the height is 1.8 microns.

[0041] see figure 2 , is the distribution diagram of several continuous three-dimensional curved surface units provided in the first embodiment.

[0042] In this embodiment, the three-dimensional curved surface units are closely arranged in a quadrilateral, and the far-field diffraction pattern generated by the incident parallel coherent light on the three-dimensional curved surface unit is a quadrilateral point beam splitter.

[0043]...

Embodiment 2

[0046] see image 3 , is a cross-sectional view of the diffractive optical element provided in Embodiment 2.

[0047] In this embodiment, the optical surface of the diffractive optical element is composed of continuous three-dimensional curved surface units, and the three-dimensional curved surface unit is composed of three-dimensional concave curved surfaces. The shape surface has a size of 5 microns and a height of 1 micron.

[0048] see Figure 4 , is the distribution diagram of several continuous three-dimensional curved surface units provided in the second embodiment.

[0049] In this embodiment, the three-dimensional curved surface units are sparsely arranged in a quadrilateral, and the far-field diffraction pattern generated by the incident parallel coherent light on the three-dimensional curved surface unit is a quadrilateral point beam splitter.

[0050] At a wavelength of 650nm, the diffraction angle of each order is 7°, and there are 7 clearly visible diffraction...

Embodiment 3

[0052] see Figure 5 , is a cross-sectional view of the diffractive optical element provided in the third embodiment.

[0053] In this embodiment, the optical surface of the diffractive optical element is composed of continuous three-dimensional curved surface units, the three-dimensional curved surface unit is composed of three-dimensional wavy curved surfaces, the material of the three-dimensional wavy curved surfaces is optical glass (quartz), and each three-dimensional wavy curved surface The size is 3 microns, and the height is 1.5 microns (referring to the peak or trough height).

[0054] see Figure 6 , is the distribution diagram of several continuous three-dimensional curved surface units provided in the third embodiment.

[0055] In this embodiment, the three-dimensional curved surface units are sparsely arranged in a hexagonal shape, and the far-field diffraction pattern generated by the incident parallel coherent light on the three-dimensional curved surface unit i...

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Abstract

The invention provides a diffractive optical element. The optical surface of the diffractive optical element is formed by a plurality of continuous three-dimensional surface units; parallel coherent light is incident on the optical surface to produce a diffraction pattern formed by multiple diffraction orders, and the angle of the diffractive optical element is expanded. Besides, the invention also provides an optical device containing the diffractive optical element.

Description

technical field [0001] The present invention relates to an optical device, in particular to a diffractive optical element and an optical device comprising the same diffractive optical element. Background technique [0002] Diffractive optical devices are widely used in beam shaping, beam splitting and generation of special optical patterns, and can be applied in the fields of structured light three-dimensional measurement, laser radar, optical communication and stage display. [0003] The optical surface of the current diffractive optical device is mainly stepped. By marking two-dimensional gratings with different numbers of discrete steps on the optical plane, the discrete two-dimensional gratings with different depths can produce different phase modulations, thereby generating diffraction in the far field. pattern. [0004] However, due to the constraints of existing design methods, this stepped diffraction device can only use the first-order diffraction, and the divergen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/18
CPCG02B5/1866G02B2005/1804
Inventor 杜春雷夏良平
Owner ZHUHAI MULTISCALE PHOTOELECTRIC TECH CO LTD