Method for preparing getter film

Abstract

The invention relates to a method for preparing a getter film, and belongs to the technical field of getter films. Prepared composite alloy is adopted as a target material, pretreated ceramic is adopted as a receiving substrate, an ultrahigh-vacuum magnetron sputtering coating system is adopted for sputtering coating, and the getter film is obtained. A single layer film of the getter film only contains a body layer, a double-layer film of the getter film contains a body layer and an attached layer at the same time, and the air absorption performance of the body layer is improved due to the existence of the attached layer. The getter film prepared through the method is smaller in occupied space in a vacuum device; electric leakage and other adverse reactions of an electrical apparatus element in the vacuum device are avoided; the getter film can be applied to the vacuum device high in work temperature; the getter film can be activated repeatedly, and is long in service life. The getterfilm can be prepared into different patterns or sizes, the activation temperature is low, the air absorption volume is large, the coverage degree and the thickness are flexible and controllable, the firmness is high, granulation is avoided, and the process compatibility of the getter film and the vacuum degree producing and packaging process is good.

Description

technical field [0001] The invention relates to a method for preparing a getter film and belongs to the technical field of getter films. Background technique [0002] A getter material is a special functional material that effectively absorbs active gases through physical and chemical actions, also known as a getter or getter. In the practical application of getters, it is mainly divided into evaporable getters and non-evaporable getters according to the different ways of obtaining the active surface of getters. [0003] The getter film is a film-type getter material formed by depositing a non-evaporable getter alloy or component on a substrate of a specific shape through a certain preparation process. The substrate can be a vacuum container tube wall, a packaged tube shell, semiconductor chips, etc. In addition to all the advantages of non-evaporable getters, the getter film can also be prepared in different patterns or sizes, with low activation temperature, large suctio...

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is to solve the problem that V is contained in most non-evaporativ