Bending insensitive pressure sensor
A pressure sensor, bending-insensitive technology, applied in the field of micro-sensors, to achieve the effect of reducing the comprehensive elastic modulus
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[0013] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0014] see figure 1 and figure 2 As shown, a bending insensitive pressure sensor of the present invention comprises a flexible substrate 1, a gold-plated film layer 2 coated on the flexible substrate 1, and a nanoporous structure arranged between the flexible substrate 1 and the gold-plated film layer 2 Layer 3.
[0015] see figure 1 and figure 2 As shown, the flexible substrate 1 is made of polyethylene glycol phthalate material, and the nanoporous structure layer 3 is a porous material layer composed of nanofibers with a diameter of 500-800 nanometers and mixed conductive nanomaterials. The mixed conductive materials are located in the nanometer Inside the fiber matrix, the mass fraction is 1-2wt%; the mixed conductive material is composed of carbon nanotubes 31 with a diameter of 10-50 nanometers and graphene 32 with a thickn...
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