Bending insensitive pressure sensor

A pressure sensor, bending-insensitive technology, applied in the field of micro-sensors, to achieve the effect of reducing the comprehensive elastic modulus

Inactive Publication Date: 2019-01-15
CHANGZHOU UNIV
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  • Abstract
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Problems solved by technology

[0003] The technical problem to be solved in the present invention is: aiming at the technical problems existing in the prior art, the present invention provides a bending insensitive ...

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Embodiment Construction

[0013] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0014] see figure 1 and figure 2 As shown, a bending insensitive pressure sensor of the present invention comprises a flexible substrate 1, a gold-plated film layer 2 coated on the flexible substrate 1, and a nanoporous structure arranged between the flexible substrate 1 and the gold-plated film layer 2 Layer 3.

[0015] see figure 1 and figure 2 As shown, the flexible substrate 1 is made of polyethylene glycol phthalate material, and the nanoporous structure layer 3 is a porous material layer composed of nanofibers with a diameter of 500-800 nanometers and mixed conductive nanomaterials. The mixed conductive materials are located in the nanometer Inside the fiber matrix, the mass fraction is 1-2wt%; the mixed conductive material is composed of carbon nanotubes 31 with a diameter of 10-50 nanometers and graphene 32 with a thickn...

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Abstract

The invention discloses a bending insensitive pressure sensor, and belongs to the field of micro-sensors. The bending insensitive pressure sensor comprises a flexible substrate (1), a gold-plated filmlayer (2) and a nanoporous structure layer (3), wherein the flexible substrate (1) is coated with the gold-plated film layer (2); the nanoporous structure layer (3) is arranged between the flexible substrate (1) and the gold-plated film layer (2); the flexible substrate (1) is made of polyethylene terephthalate; the nanoporous structure layer (3) is a porous material layer made of nanofibers withdiameters of 500 to 800 nanometers and a mixed conductive nanomaterial; the mixed conductive nanomaterial is located inside a nanofiber substrate, and is 1 to 2 percent by mass; the mixed conductivenanomaterial is made of carbon nanotubes (31) with diameters of 10 to 50 nanometers and graphene (32) with a thickness of 10 to 50 nanometers. The bending insensitive pressure sensor is suitable for flexible surface detection, has relatively low comprehensive elastic modulus, and does not generate additional pressure when measuring surface bending.

Description

technical field [0001] The invention mainly relates to the field of micro sensors, in particular to a bending insensitive pressure sensor. Background technique [0002] The pressure sensor used to measure the flexible surface needs good mechanical contact with the flexible surface. Since the elastic modulus of the pressure sensor material is high, the bending of the flexible surface will inevitably cause the stress induced by the lateral strain of the pressure sensor. Therefore, it is necessary to design a pressure sensor that is insensitive to bending strain and has a reduced overall elastic modulus. Contents of the invention [0003] The technical problem to be solved in the present invention is: aiming at the technical problems existing in the prior art, the present invention provides a bending insensitive sensor which is suitable for flexible surface detection, has a low comprehensive elastic modulus, and does not generate additional pressure when the measuring surface...

Claims

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Application Information

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IPC IPC(8): G01L1/16
CPCG01L1/16
Inventor 班书昊李晓艳蒋学东席仁强何云松谭邹卿徐然
Owner CHANGZHOU UNIV
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