Annular shear type deflection electric acceleration sensor and laminated structure acceleration sensor
An acceleration sensor and circular shearing technology, applied in the field of sensors, can solve the problems of inconvenient acceleration sensors, poor stability of pressure sensors, and affecting test accuracy, etc., and achieve the effects of improving sensitivity, increasing signal amplitude, and convenient design
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[0026] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0027] as attached Figure 1-2 As shown, the present invention discloses an annular shear type flexoelectric acceleration sensor, comprising a support rod 5, an output terminal 7, an annular mass block 2 and an annular sensitive block 3, and the annular sensitive block 3 is made of a flexoelectric dielectric material It is preferably a non-polarized strontium barium titanate ring with a thickness of 5 mm and a height of 1 mm. The inner and outer rings of the ring are coated with a metal film layer 1. The metal film layer 1 is deposited by evaporation. Usually A gold film with a thickness of 10nm is used as the output electrode of the flexoelectric dielectric material.
[0028] Annular mass 2 is preferably 8mm thick, 1mm high tungsten ring, the inner ring of annular sensitive block 3 is fixed on the upper end of support rod 5, the inn...
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